An embedded 2D imager for microscale flowmetry based on optical feedback interferometry
Résumé
We present a compact and embedded imager based on the Optical Feedback Interferometry (OFI) sensing scheme that gives quantitative information about the velocity in fluids at micro-scale through the Doppler-Fizeau effect. This sensor can reach a spatial imaging resolution up to 5 μm in 2D scanning using a MEMS 2 axis beam-steering mirror. As an illustration of the imager performances, a 500 μm circular channel flow profile is measured. An image (300x50 pixels) of a 100 μm square section channel is successfully obtained thus validating the device.
Domaines
Optique / photonique| Origine | Fichiers produits par l'(les) auteur(s) |
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