<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-01623154</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-24T02:13:52+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Role of Trimethylaluminum in Low Temperature Atomic Layer Deposition of Silicon Nitride</title>
            <author role="aut">
              <persName>
                <forename type="first">Aaron</forename>
                <surname>Dangerfield</surname>
              </persName>
              <idno type="halauthorid">1254460-0</idno>
              <affiliation ref="#struct-71621"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Charith E.</forename>
                <surname>Nanayakkara</surname>
              </persName>
              <idno type="halauthorid">1121419-0</idno>
              <affiliation ref="#struct-71621"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Anupama</forename>
                <surname>Mallikarjunan</surname>
              </persName>
              <idno type="halauthorid">1254461-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Xinjian</forename>
                <surname>Lei</surname>
              </persName>
              <idno type="halauthorid">1254462-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Ronald</forename>
                <forename type="middle">M</forename>
                <surname>Pearlstein</surname>
              </persName>
              <idno type="halauthorid">1254463-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Agnes</forename>
                <surname>Derecskei-Kovacs</surname>
              </persName>
              <idno type="halauthorid">1254464-0</idno>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Jérémy</forename>
                <surname>Cure</surname>
              </persName>
              <idno type="halauthorid">1203440-0</idno>
              <affiliation ref="#struct-458088"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Alain</forename>
                <surname>Estève</surname>
              </persName>
              <email type="md5">3149ddb76a12029edc5fb242d7852802</email>
              <email type="domain">laas.Fr</email>
              <idno type="idhal" notation="string">alain-esteve</idno>
              <idno type="idhal" notation="numeric">736349</idno>
              <idno type="halauthorid" notation="string">43486-736349</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-0301-7479</idno>
              <idno type="IDREF">https://www.idref.fr/103163212</idno>
              <affiliation ref="#struct-458088"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Yves J.</forename>
                <surname>Chabal</surname>
              </persName>
              <idno type="halauthorid">782245-0</idno>
              <affiliation ref="#struct-71621"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>alain</forename>
                <surname>esteve</surname>
              </persName>
              <email type="md5">3149ddb76a12029edc5fb242d7852802</email>
              <email type="domain">laas.Fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2019-04-05 16:01:32</date>
              <date type="whenModified">2026-01-12 14:38:50</date>
              <date type="whenReleased">2019-04-05 16:01:32</date>
              <date type="whenProduced">2017-12</date>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="85439">
                <persName>
                  <forename>alain</forename>
                  <surname>esteve</surname>
                </persName>
                <email type="md5">3149ddb76a12029edc5fb242d7852802</email>
                <email type="domain">laas.Fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-01623154</idno>
            <idno type="halUri">https://laas.hal.science/hal-01623154</idno>
            <idno type="halBibtex">dangerfield:hal-01623154</idno>
            <idno type="halRefHtml">&lt;i&gt;Chemistry of Materials&lt;/i&gt;, 2017, 29 (14), pp.6022-6029. &lt;a target="_blank" href="https://dx.doi.org/10.1021/acs.chemmater.7b01816"&gt;&amp;#x27E8;10.1021/acs.chemmater.7b01816&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Chemistry of Materials, 2017, 29 (14), pp.6022-6029. &amp;#x27E8;10.1021/acs.chemmater.7b01816&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE2">Université Toulouse 2</idno>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-TOULOUSE">Institut National des Sciences Appliquées de Toulouse</idno>
            <idno type="stamp" n="LAAS">Laboratoire d'analyse et d'architecture des systèmes</idno>
            <idno type="stamp" n="UT1-CAPITOLE">Université Toulouse 1 Capitole</idno>
            <idno type="stamp" n="LAAS-GESTION-DE-L-ENERGIE" corresp="LAAS">LAAS-Gestion de l'énergie</idno>
            <idno type="stamp" n="UNIV-COTEDAZUR">Université Côte d'Azur</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="TEST7-HALCNRS">test 7 du portail hal cnrs</idno>
            <idno type="stamp" n="UNIV-COTEDAZUR_COLLECTION_DEFAUT">UNIV-COTEDAZUR_COLLECTION_DEFAUT</idno>
            <idno type="stamp" n="LAAS-MRS" corresp="LAAS-GESTION-DE-L-ENERGIE">Équipe Matériaux Réactifs et Stockage d'énergie</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Role of Trimethylaluminum in Low Temperature Atomic Layer Deposition of Silicon Nitride</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Aaron</forename>
                    <surname>Dangerfield</surname>
                  </persName>
                  <idno type="halauthorid">1254460-0</idno>
                  <affiliation ref="#struct-71621"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Charith E.</forename>
                    <surname>Nanayakkara</surname>
                  </persName>
                  <idno type="halauthorid">1121419-0</idno>
                  <affiliation ref="#struct-71621"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Anupama</forename>
                    <surname>Mallikarjunan</surname>
                  </persName>
                  <idno type="halauthorid">1254461-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Xinjian</forename>
                    <surname>Lei</surname>
                  </persName>
                  <idno type="halauthorid">1254462-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Ronald</forename>
                    <forename type="middle">M</forename>
                    <surname>Pearlstein</surname>
                  </persName>
                  <idno type="halauthorid">1254463-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Agnes</forename>
                    <surname>Derecskei-Kovacs</surname>
                  </persName>
                  <idno type="halauthorid">1254464-0</idno>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Jérémy</forename>
                    <surname>Cure</surname>
                  </persName>
                  <idno type="halauthorid">1203440-0</idno>
                  <affiliation ref="#struct-458088"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Alain</forename>
                    <surname>Estève</surname>
                  </persName>
                  <email type="md5">3149ddb76a12029edc5fb242d7852802</email>
                  <email type="domain">laas.Fr</email>
                  <idno type="idhal" notation="string">alain-esteve</idno>
                  <idno type="idhal" notation="numeric">736349</idno>
                  <idno type="halauthorid" notation="string">43486-736349</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-0301-7479</idno>
                  <idno type="IDREF">https://www.idref.fr/103163212</idno>
                  <affiliation ref="#struct-458088"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Yves J.</forename>
                    <surname>Chabal</surname>
                  </persName>
                  <idno type="halauthorid">782245-0</idno>
                  <affiliation ref="#struct-71621"/>
                </author>
              </analytic>
              <monogr>
                <idno type="localRef">Rapport LAAS n° 17137</idno>
                <idno type="halJournalId" status="VALID">11637</idno>
                <idno type="issn">0897-4756</idno>
                <idno type="eissn">1520-5002</idno>
                <title level="j">Chemistry of Materials</title>
                <imprint>
                  <publisher>American Chemical Society</publisher>
                  <biblScope unit="volume">29</biblScope>
                  <biblScope unit="issue">14</biblScope>
                  <biblScope unit="pp">6022-6029</biblScope>
                  <date type="datePub">2017-12</date>
                  <date type="dateEpub">2017-07</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1021/acs.chemmater.7b01816</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="chim.mate">Chemical Sciences/Material chemistry</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Aminosilanes are attractive precursors for atomic layer deposition of silicon oxides and nitrides because they are halide-free and more reactive than chlorosilanes. However, the deposition of silicon nitride on oxide substrates still requires relatively high temperatures. We show here that for a process involving disec-butylaminosilane and hydrazine, the insertion of Al from trimethyl aluminum allows the deposition of silicon nitride films at relatively low temperatures (250 °C). First-principles calculations reveal that the presence of Al increases the binding of molecular hydrazine, thereby effectively enhancing the reactivity of hydrazine with the silicon precursor during the atomic layer deposition process, which leads to nitrogen incorporation into silicon. However, the range of this enhancement is limited to ∼1 nm, requiring additional trimethylaluminum exposures to continue the Si 3 N 4 deposition.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="institution" xml:id="struct-71621" status="VALID">
          <orgName>University of Texas at Dallas [Richardson]</orgName>
          <orgName type="acronym">UT Dallas</orgName>
          <desc>
            <address>
              <addrLine>800 West Campbell Road, Richardson, TX 75080-3021</addrLine>
              <country key="US"/>
            </address>
            <ref type="url">http://www.utdallas.edu/</ref>
          </desc>
        </org>
        <org type="researchteam" xml:id="struct-458088" status="OLD">
          <orgName>Équipe Nano-ingénierie et intégration des oxydes métalliques et de leurs interfaces</orgName>
          <orgName type="acronym">LAAS-NEO</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/neo</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-459" status="OLD">
          <idno type="IdRef">199278792</idno>
          <idno type="ISNI">0000 0001 2188 216X </idno>
          <idno type="RNSR">199517454Y</idno>
          <idno type="ROR">https://ror.org/03vcm6439</idno>
          <orgName>Laboratoire d'analyse et d'architecture des systèmes</orgName>
          <orgName type="acronym">LAAS</orgName>
          <date type="start">1968-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>7 Av du colonel Roche 31077 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laas.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-81148" type="direct"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation name="UPR8001" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-81148" status="VALID">
          <idno type="IdRef">026404354</idno>
          <idno type="ISNI">0000000121902837</idno>
          <idno type="ROR">https://ror.org/0443n9e75</idno>
          <orgName>Université Toulouse Capitole</orgName>
          <orgName type="acronym">UT Capitole</orgName>
          <date type="start">1970-01-01</date>
          <desc>
            <address>
              <addrLine>2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ut-capitole.fr/</ref>
          </desc>
          <listRelation>
            <relation name="443875" active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116255" status="VALID">
          <idno type="IdRef">026388766</idno>
          <idno type="ISNI">0000 0001 2286 8343</idno>
          <idno type="ROR">https://ror.org/01h8pf755</idno>
          <idno type="Wikidata">Q858979</idno>
          <orgName>Institut National des Sciences Appliquées - Toulouse</orgName>
          <orgName type="acronym">INSA Toulouse</orgName>
          <date type="start">1963-10-21</date>
          <desc>
            <address>
              <addrLine>135, avenue de Rangueil - 31077 Toulouse cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-toulouse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116256" status="VALID">
          <idno type="IdRef">026403994</idno>
          <idno type="ROR">https://ror.org/04ezk3x31</idno>
          <orgName>Université Toulouse - Jean Jaurès</orgName>
          <orgName type="acronym">UT2J</orgName>
          <date type="start">1971-01-01</date>
          <desc>
            <address>
              <addrLine>5 allées Antonio Machado - 31058 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>