Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

This paper deals with the study of spin coating processes for the deposition of polysiloxane-based thin films. Specific developments are proposed in order to adapt the hydrodynamic laws theory to the spin coating of Maxwellian liquids. Theoretical and experimental results are compared, evidencing a good fit and enabling to define the Maxwellian law for the studied polysiloxane polymer. Finally, the theoretical developments are successfully extended to the BCB 4026 and SU-8 3050 photosensitive resins.

Mots clés

SU-8 resin 2 Maxwellian liquids spin coating polysiloxane BCB resin

Domaines

Génie des procédés Micro et nanotechnologies/Microélectronique

Fichier principal

paper_spincoating.pdf (1.11 Mo)

Origine	Fichiers produits par l'(les) auteur(s)

Pierre Temple-Boyer : Connectez-vous pour contacter le contributeur

https://laas.hal.science/hal-01687852

Soumis le : jeudi 18 janvier 2018-18:51:49

Dernière modification le : mercredi 13 décembre 2023-18:06:50

Archivage à long terme le : jeudi 24 mai 2018-01:35:53

Dates et versions

hal-01687852 , version 1 (18-01-2018)

Identifiants

HAL Id : hal-01687852 , version 1
DOI : 10.1016/j.mee.2009.06.030

Citer

Pierre Temple-Boyer, Laurent Mazenq, Jean-Baptiste Doucet, Véronique Conédéra, Benoit Torbiero, et al.. Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids. Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩. ⟨hal-01687852⟩

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