@article{legrand:hal-01765180, TITLE = {{Multi-MHz micro-electro-mechanical sensors for atomic force microscopy}}, AUTHOR = {Legrand, Bernard and Salvetat, Jean-Paul and Walter, Benjamin and Faucher, Marc and Theron, Didier and Aim{\'e}, Jean-Pierre}, URL = {https://laas.hal.science/hal-01765180}, JOURNAL = {{Ultramicroscopy}}, HAL_LOCAL_REFERENCE = {Rapport LAAS N{\textdegree} 16320}, PUBLISHER = {{Elsevier}}, VOLUME = {175}, PAGES = {46 - 57}, YEAR = {2017}, MONTH = Apr, DOI = {10.1016/j.ultramic.2017.01.005}, PDF = {https://laas.hal.science/hal-01765180/file/Ultramicroscopy2017_HAL.pdf}, HAL_ID = {hal-01765180}, HAL_VERSION = {v1}, }