@article{habbachi:hal-01838581, TITLE = {{Fabrication and modeling of a capacitor microfluidically tuned by water }}, AUTHOR = {Habbachi, Nizar and Boussetta, Hatem and Boukabache, Ali and Kallala, Mouhamed Adel and Pons, Patrick and Besbes, Kamel}, URL = {https://laas.hal.science/hal-01838581}, JOURNAL = {{IEEE Electron Device Letters}}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree}16480}, PUBLISHER = {{Institute of Electrical and Electronics Engineers}}, VOLUME = {38}, NUMBER = {2}, PAGES = {277-280}, YEAR = {2017}, MONTH = Feb, KEYWORDS = {MEMS ; capacitor ; tuning ; fluid}, PDF = {https://laas.hal.science/hal-01838581/file/Fabrication%20and%20modeling%20of%20a%20capacitor%20microfluidically%20tuned%20by%20water%20-%20LAAS.pdf}, HAL_ID = {hal-01838581}, HAL_VERSION = {v1}, }