@article{habbachi:hal-01852455, TITLE = {{Design and fabrication of a continuously tuned capacitor by microfluidic actuation}}, AUTHOR = {Habbachi, Nizar and Boussetta, Hatem and Boukabache, Ali and Kallala, Mohamed Adel and Pons, Patrick and Besbes, Kamel}, URL = {https://laas.hal.science/hal-01852455}, JOURNAL = {{Journal of Micromechanics and Microengineering}}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 16269}, PUBLISHER = {{IOP Publishing}}, VOLUME = {28}, NUMBER = {3}, YEAR = {2018}, MONTH = Mar, DOI = {10.1088/1361-6439/aaa63a}, KEYWORDS = {RF MEMS ; Tunable capacitor ; CPW ; RF characterization ; Fluidic actuation}, PDF = {https://laas.hal.science/hal-01852455/file/Design%20and%20fabrication%20of%20a%20continuously%20tuned%20capacitor%20by%20microfluidic%20actuation.pdf}, HAL_ID = {hal-01852455}, HAL_VERSION = {v1}, }