@inproceedings{charlot:hal-01869404, TITLE = {{Low stress polyimide multilayers integration for flexible substrate}}, AUTHOR = {Charlot, Samuel and Castagnola, Valentina and Descamps, Emeline}, URL = {https://laas.hal.science/hal-01869404}, BOOKTITLE = {{Smart System Integration}}, ADDRESS = {Vienne, Austria}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 14061}, PAGES = {4p.}, YEAR = {2014}, MONTH = Mar, PDF = {https://laas.hal.science/hal-01869404/file/low%20stress%20flexible%20substrate.pdf}, HAL_ID = {hal-01869404}, HAL_VERSION = {v1}, }