Low cost integration of multilevel lab-on-a-chip using a new generation of dry film photoresists
Résumé
We present the use of a novel dry film photoresist DF-1050 (EMS) for the integration of multilevel microfluidic systems. We showed that high resolution and high aspect ratio (7:1) can be achieved for free standing structures. We proved also that the dry film autofluorescence level is compatible with most of lab-on-a-chip applications and established the biocompatibility of this dry film. Ultimately, we demonstrated that this low-cost material combined with multilevel lamination technology would allow introducing massively 3D microfluidic in lab-on-a-chip devices.
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