@article{guerfi:hal-01942316, TITLE = {{Thin-dielectric-layer engineering for 3D nanostructure integration using an innovative planarization approach}}, AUTHOR = {Guerfi, Youssouf and Doucet, Jean-Baptiste and Larrieu, Guilhem}, URL = {https://laas.hal.science/hal-01942316}, JOURNAL = {{Nanotechnology}}, HAL_LOCAL_REFERENCE = {RApport LAAS n{\textdegree} 15430}, PUBLISHER = {{Institute of Physics}}, VOLUME = {26}, NUMBER = {42}, PAGES = {425302}, YEAR = {2015}, MONTH = Oct, DOI = {10.1088/0957-4484/26/42/425302}, HAL_ID = {hal-01942316}, HAL_VERSION = {v1}, }