@article{xiong:hal-01960910, TITLE = {{Two types of MEMS-based oscillating AFM probes}}, AUTHOR = {Xiong, Zhuang and Mairiaux, Estelle and Walter, Benjamin and Faucher, Marc and Buchaillot, Lionel and Legrand, Bernard}, URL = {https://hal.laas.fr/hal-01960910}, JOURNAL = {{Journal of Chinese Electron Microscopy Society }}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 14786}, PUBLISHER = {{ Chinese Physical Society }}, VOLUME = {2}, PAGES = {137-141}, YEAR = {2014}, HAL_ID = {hal-01960910}, HAL_VERSION = {v1}, }