@article{xiong:hal-01961045, TITLE = {{Design and measurement of AFM probe based on MEMS resonator}}, AUTHOR = {Xiong, Zhuang and Legrand, Bernard}, URL = {https://hal.laas.fr/hal-01961045}, JOURNAL = {{High Power Laser and Particle Beams}}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 15809}, PUBLISHER = {{China Academy of Engineering Physics and Nuclear Society}}, VOLUME = {27}, NUMBER = {2}, PAGES = {024119-1}, YEAR = {2015}, MONTH = Feb, DOI = {10.11884/HPLPB201527.024119}, HAL_ID = {hal-01961045}, HAL_VERSION = {v1}, }