@inproceedings{fuinel:hal-01962426, TITLE = {{High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration}}, AUTHOR = {Fuinel, C{\'e}cile and Mathieu, Fabrice and Laborde, Adrian and Mazenq, Laurent and Bergaud, Christian and Legrand, Bernard}, URL = {https://laas.hal.science/hal-01962426}, BOOKTITLE = {{19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17}}, ADDRESS = {Kaohsiung, Taiwan}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 17696}, YEAR = {2017}, MONTH = Jun, DOI = {10.1109/TRANSDUCERS.2017.7994155}, HAL_ID = {hal-01962426}, HAL_VERSION = {v1}, }