High performances of new microhotplate for gas sensors
Résumé
The main goal of this work is to improve significantly performances of microhotplate for gas sensors. This article describes technological optimizations (materials and design) used to reach high and stable operating temperature, in reducing intrinsic drift problems (linked to standard polySilicon heater). Our heating platforms present low buckling effect, low consumption and good thermal homogeneity all over the active area.
Origine | Fichiers produits par l'(les) auteur(s) |
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