Development of a Micro-hotplate for different Metal Oxide Gas Sensors with High Operating Temperatures
Résumé
The main goal of this work is to realize a metal oxide gas sensor with stable operating temperature. This article describes our approach and the technological process used to reach a high and stable operating temperature (650-700°C), with low consumption (100mW) and good thermal homogeneity all over the active area.
| Origine | Fichiers produits par l'(les) auteur(s) |
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