Development of a New Micromachined Metal Oxide Gas Sensor: Application to Hazardous Gas Detection for Automotive Air Quality Control
Résumé
This article deals with a new generation of semiconducting gas sensor based on a microhotplate realized on a silicon nitride membrane associated with an optimized temperature profile (T.P.) applied on heating resistor. Firstly, the technological process has been modified in order to enhance as a priority the long term stability and to allow the sensor working at higher temperature (>450°C). Secondly, a new method of data treatment is also investigated from normalized transient response of the sensor. The main goal of this new method is to identify different gas mixtures and quantify the target gas concentration. In this article, this new operating mode applied to a single Pt-doped SnO 2 gas sensor is presented to discriminate CO-concentrations in synthetic air in presence of interfering gases as NO2 and C3H8 independently of relative humidity rate. One of applications is the air quality control in automotive cabin.
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