@inproceedings{presmanes:hal-02172260, TITLE = {{Ga doped ZnO thin films deposited by RF sputtering for NO2 sensing}}, AUTHOR = {Presmanes, L. and Gunasekaran, V. and Thimont, Y. and Sinnarasa, I. and Barnab{\'e}, A. and Tailhades, P. and Menini, Philippe}, URL = {https://laas.hal.science/hal-02172260}, BOOKTITLE = {{The Experiment@ International Conference (Exp.at'19)}}, ADDRESS = {Funchal, Portugal}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 19195}, EDITOR = {IEEE}, YEAR = {2019}, MONTH = Jun, KEYWORDS = {ZnO:Ga ; thin film ; RF-sputtering ; gas sensor ; micro-hotplate ; NO2 ; microsensor ; low-cost sensor}, PDF = {https://laas.hal.science/hal-02172260/file/Abstract_ZnO_final_v5-auteur.pdf}, HAL_ID = {hal-02172260}, HAL_VERSION = {v1}, }