<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-03196107</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-20T21:27:20+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Using polydimethylsiloxane as a thermocurable resist for a soft imprint lithography process</title>
            <author role="aut">
              <persName>
                <forename type="first">Laurent</forename>
                <surname>Malaquin</surname>
              </persName>
              <email type="md5">d9ed1389affa8cddce77b8aad3be2b12</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">laurent-malaquin</idno>
              <idno type="idhal" notation="numeric">13251</idno>
              <idno type="halauthorid" notation="string">34412-13251</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/B-4852-2016</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-4791-3352</idno>
              <idno type="IDREF">https://www.idref.fr/084024623</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/B-4852-2016</idno>
              <affiliation ref="#struct-467299"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Franck</forename>
                <surname>Carcenac</surname>
              </persName>
              <email type="md5">a812fe6800d310ecd507064ea119a87a</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">franck-carcenac</idno>
              <idno type="idhal" notation="numeric">14023</idno>
              <idno type="halauthorid" notation="string">10798-14023</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-9660-9931</idno>
              <orgName ref="#struct-389044"/>
              <affiliation ref="#struct-389044"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Christophe</forename>
                <surname>Vieu</surname>
              </persName>
              <email type="md5">7883421a490992a534727effb9092751</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">christophe-vieu</idno>
              <idno type="idhal" notation="numeric">4213</idno>
              <idno type="halauthorid" notation="string">19279-4213</idno>
              <idno type="IDREF">https://www.idref.fr/033337330</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-2745-8743</idno>
              <affiliation ref="#struct-467299"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">M.</forename>
                <surname>Mauzac</surname>
              </persName>
              <idno type="halauthorid">2187960-0</idno>
              <affiliation ref="#struct-756"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Franck</forename>
                <surname>Carcenac</surname>
              </persName>
              <email type="md5">a812fe6800d310ecd507064ea119a87a</email>
              <email type="domain">laas.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2021-04-12 14:42:40</date>
              <date type="whenModified">2025-10-24 03:18:09</date>
              <date type="whenReleased">2021-04-12 14:42:40</date>
              <date type="whenProduced">2002-07</date>
              <ref type="externalLink" target="https://api.istex.fr/ark:/67375/6H6-CN7JNDCB-2/fulltext.pdf?sid=hal"/>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="513144">
                <persName>
                  <forename>Franck</forename>
                  <surname>Carcenac</surname>
                </persName>
                <email type="md5">a812fe6800d310ecd507064ea119a87a</email>
                <email type="domain">laas.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-03196107</idno>
            <idno type="halUri">https://laas.hal.science/hal-03196107</idno>
            <idno type="halBibtex">malaquin:hal-03196107</idno>
            <idno type="halRefHtml">&lt;i&gt;Microelectronic Engineering&lt;/i&gt;, 2002, 61-62, pp.379-384. &lt;a target="_blank" href="https://dx.doi.org/10.1016/S0167-9317(02)00573-7"&gt;&amp;#x27E8;10.1016/S0167-9317(02)00573-7&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Microelectronic Engineering, 2002, 61-62, pp.379-384. &amp;#x27E8;10.1016/S0167-9317(02)00573-7&amp;#x27E9;</idno>
            <availability status="restricted"/>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE2">Université Toulouse 2</idno>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-TOULOUSE">Institut National des Sciences Appliquées de Toulouse</idno>
            <idno type="stamp" n="LAAS">Laboratoire d'analyse et d'architecture des systèmes</idno>
            <idno type="stamp" n="UT1-CAPITOLE">Université Toulouse 1 Capitole</idno>
            <idno type="stamp" n="LAAS-TEAM" corresp="LAAS">Service Techniques et Équipements Appliqués à la Microélectronique</idno>
            <idno type="stamp" n="LAAS-MICRO-NANO-BIO-TECHNOLOGIES" corresp="LAAS">LAAS-Micro Nano Bio Technologies</idno>
            <idno type="stamp" n="LAAS-ELIA" corresp="LAAS-MICRO-NANO-BIO-TECHNOLOGIES">Équipe Ingénierie pour les sciences du vivant</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="TEST2-HALCNRS">TEST2-HALCNRS</idno>
            <idno type="stamp" n="TEST7-HALCNRS">test 7 du portail hal cnrs</idno>
            <idno type="stamp" n="SOFTMAT">Laboratoire Chimie des colloïdes, polymères &amp; assemblages complexes</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Using polydimethylsiloxane as a thermocurable resist for a soft imprint lithography process</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Laurent</forename>
                    <surname>Malaquin</surname>
                  </persName>
                  <email type="md5">d9ed1389affa8cddce77b8aad3be2b12</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">laurent-malaquin</idno>
                  <idno type="idhal" notation="numeric">13251</idno>
                  <idno type="halauthorid" notation="string">34412-13251</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/B-4852-2016</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-4791-3352</idno>
                  <idno type="IDREF">https://www.idref.fr/084024623</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/B-4852-2016</idno>
                  <affiliation ref="#struct-467299"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Franck</forename>
                    <surname>Carcenac</surname>
                  </persName>
                  <email type="md5">a812fe6800d310ecd507064ea119a87a</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">franck-carcenac</idno>
                  <idno type="idhal" notation="numeric">14023</idno>
                  <idno type="halauthorid" notation="string">10798-14023</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-9660-9931</idno>
                  <orgName ref="#struct-389044"/>
                  <affiliation ref="#struct-389044"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Christophe</forename>
                    <surname>Vieu</surname>
                  </persName>
                  <email type="md5">7883421a490992a534727effb9092751</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">christophe-vieu</idno>
                  <idno type="idhal" notation="numeric">4213</idno>
                  <idno type="halauthorid" notation="string">19279-4213</idno>
                  <idno type="IDREF">https://www.idref.fr/033337330</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-2745-8743</idno>
                  <affiliation ref="#struct-467299"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">M.</forename>
                    <surname>Mauzac</surname>
                  </persName>
                  <idno type="halauthorid">2187960-0</idno>
                  <affiliation ref="#struct-756"/>
                </author>
              </analytic>
              <monogr>
                <idno type="localRef">Rapport LAAS n° 01498</idno>
                <idno type="halJournalId" status="VALID">17081</idno>
                <idno type="issn">0167-9317</idno>
                <idno type="eissn">1873-5568</idno>
                <title level="j">Microelectronic Engineering</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">61-62</biblScope>
                  <biblScope unit="pp">379-384</biblScope>
                  <date type="datePub">2002-07</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/S0167-9317(02)00573-7</idno>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Mold Nanoimprint lithography</term>
                <term xml:lang="en">PDMS</term>
                <term xml:lang="en">PMMA</term>
                <term xml:lang="en">High resolution</term>
                <term xml:lang="en">Electron beam lithography</term>
              </keywords>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halDomain" n="spi.nano">Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Nanoimprint lithography has been investigated using polydimethylsiloxane as a thermocurable resist. This novel process allowed us to reduce both pressure (&lt;10 bars) and temperature (80 °C) when compared to a conventional imprinting process with a thermoplastic polymer resist such as polymethylmethacrylate. Using a new formulation of the elastomeric material, we have demonstrated high quality imprinting of both micronic and nanometric structures with no evidence of any viscous flow problems. The excellent etching resistance of the polydimethylsiloxane structures to a reactive ion etching silicon process and the compatibility with a lift-off procedure for pattern transfer are also presented.</p>
            </abstract>
            <particDesc>
              <org type="ir" xml:id="fr-esr-fdr-ir-097">
                <orgName type="acronym">RENATECH+</orgName>
                <idno type="wikidata">Q33121910</idno>
              </org>
            </particDesc>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="researchteam" xml:id="struct-467299" status="OLD">
          <orgName>Équipe Ingénierie pour les sciences du vivant</orgName>
          <orgName type="acronym">LAAS-ELIA</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://hal-laas.archives-ouvertes.fr/LAAS-ELIA/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-389044" status="OLD">
          <orgName>Service Techniques et Équipements Appliqués à la Microélectronique</orgName>
          <orgName type="acronym">LAAS-TEAM</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/team</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-756" status="OLD">
          <idno type="IdRef">238305007</idno>
          <idno type="RNSR">199512052B</idno>
          <idno type="ROR">https://ror.org/0171mae58</idno>
          <orgName>Interactions moléculaires et réactivité chimique et photochimique</orgName>
          <orgName type="acronym">IMRCP</orgName>
          <date type="start">1995-01-01</date>
          <date type="end">2023-09-01</date>
          <desc>
            <address>
              <addrLine>Bat. 2R1 RECHERCHE DE CHIMIE 118 Route de Narbonne 31062 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://imrcp.ups-tlse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-159253" type="direct"/>
            <relation active="#struct-67872" type="indirect"/>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UAR2599 / FR2599" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="indirect"/>
            <relation active="#struct-166355" type="direct"/>
            <relation name="INS1650" active="#struct-441569" type="direct"/>
            <relation name="UMR5623" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-459" status="OLD">
          <idno type="IdRef">199278792</idno>
          <idno type="ISNI">0000 0001 2188 216X </idno>
          <idno type="RNSR">199517454Y</idno>
          <idno type="ROR">https://ror.org/03vcm6439</idno>
          <orgName>Laboratoire d'analyse et d'architecture des systèmes</orgName>
          <orgName type="acronym">LAAS</orgName>
          <date type="start">1968-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>7 Av du colonel Roche 31077 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laas.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-81148" type="direct"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation name="UPR8001" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-81148" status="VALID">
          <idno type="IdRef">026404354</idno>
          <idno type="ISNI">0000000121902837</idno>
          <idno type="ROR">https://ror.org/0443n9e75</idno>
          <orgName>Université Toulouse Capitole</orgName>
          <orgName type="acronym">UT Capitole</orgName>
          <date type="start">1970-01-01</date>
          <desc>
            <address>
              <addrLine>2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ut-capitole.fr/</ref>
          </desc>
          <listRelation>
            <relation name="443875" active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116255" status="VALID">
          <idno type="IdRef">026388766</idno>
          <idno type="ISNI">0000 0001 2286 8343</idno>
          <idno type="ROR">https://ror.org/01h8pf755</idno>
          <idno type="Wikidata">Q858979</idno>
          <orgName>Institut National des Sciences Appliquées - Toulouse</orgName>
          <orgName type="acronym">INSA Toulouse</orgName>
          <date type="start">1963-10-21</date>
          <desc>
            <address>
              <addrLine>135, avenue de Rangueil - 31077 Toulouse cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-toulouse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116256" status="VALID">
          <idno type="IdRef">026403994</idno>
          <idno type="ROR">https://ror.org/04ezk3x31</idno>
          <orgName>Université Toulouse - Jean Jaurès</orgName>
          <orgName type="acronym">UT2J</orgName>
          <date type="start">1971-01-01</date>
          <desc>
            <address>
              <addrLine>5 allées Antonio Machado - 31058 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regrouplaboratory" xml:id="struct-159253" status="OLD">
          <idno type="IdRef">240309472</idno>
          <idno type="ISNI">0000 0004 4686 8315</idno>
          <idno type="RNSR">200310667L</idno>
          <orgName>Institut de Chimie de Toulouse</orgName>
          <orgName type="acronym">ICT</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 Route de Narbonne 31062 Toulouse cédex 9</addrLine>
              <country key="FR"/>
            </address>
          </desc>
          <listRelation>
            <relation active="#struct-67872" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-341038" type="direct"/>
            <relation name="UAR2599 / FR2599" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-67872" status="VALID">
          <idno type="IdRef">050165224</idno>
          <idno type="ROR">https://ror.org/05q3vnk25</idno>
          <orgName>Institut de Recherche pour le Développement</orgName>
          <orgName type="acronym">IRD</orgName>
          <desc>
            <address>
              <addrLine>SiègeLe Sextant 44, bd de DunkerqueCS 9000913572 Marseille cedex 02</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ird.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-341038" status="VALID">
          <idno type="IdRef">232435103</idno>
          <idno type="ISNI">000000010626358X</idno>
          <idno type="ROR">https://ror.org/02cte4b68</idno>
          <orgName>Institut de Chimie - CNRS Chimie</orgName>
          <orgName type="acronym">INC-CNRS</orgName>
          <date type="start">2009-10-01</date>
          <desc>
            <address>
              <addrLine>CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE3 rue Michel-Ange75794 PARIS CEDEX 16 - France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.cnrs.fr/inc</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-166355" status="VALID">
          <idno type="IdRef">163530912</idno>
          <idno type="ISNI">0000000102537563</idno>
          <idno type="ROR">https://ror.org/01q76b368</idno>
          <orgName>Institut Ecologie et Environnement - CNRS Ecologie et Environnement</orgName>
          <orgName type="acronym">INEE-CNRS</orgName>
          <date type="start">2009-11-01</date>
          <desc>
            <address>
              <addrLine>3 rue Michel-Ange, 75794, Paris cedex 16, France</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inee.cnrs.fr/fr</ref>
          </desc>
          <listRelation>
            <relation name="INS1650" active="#struct-441569" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>