@incollection{duffy:hal-03341171, TITLE = {{Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors}}, AUTHOR = {Duffy, Ray and Napolitani, Enrico and Cristiano, Fuccio}, URL = {https://laas.hal.science/hal-03341171}, BOOKTITLE = {{Laser Annealing Processes in Semiconductor Technology. Theory, Modeling and Applications in Nanoelectronics}}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 21225}, PUBLISHER = {{Elsevier}}, NUMBER = {Chapter 5}, PAGES = {pp.175-250}, YEAR = {2021}, MONTH = Apr, HAL_ID = {hal-03341171}, HAL_VERSION = {v1}, }