%0 Book Section %T Materials science issues related to the fabrication of highly doped junctions by laser annealing of Group IV semiconductors %+ Tyndall National Institute [Cork] %+ Università degli Studi di Padova = University of Padua (Unipd) %+ Équipe Matériaux et Procédés pour la Nanoélectronique (LAAS-MPN) %A Duffy, Ray %A Napolitani, Enrico %A Cristiano, Fuccio %@ 9780128202555 %Z Rapport LAAS n° 21225 %B Laser Annealing Processes in Semiconductor Technology. Theory, Modeling and Applications in Nanoelectronics %I Elsevier %N Chapter 5 %P pp.175-250 %8 2021-04 %D 2021 %Z Engineering Sciences [physics]/Micro and nanotechnologies/Microelectronics %Z Physics [physics]/Condensed Matter [cond-mat]/Materials Science [cond-mat.mtrl-sci]Book sections %G English %L hal-03341171 %U https://laas.hal.science/hal-03341171 %~ UNIV-TLSE2 %~ UNIV-TLSE3 %~ CNRS %~ INSA-TOULOUSE %~ LAAS %~ UT1-CAPITOLE %~ LAAS-MPN %~ LAAS-MICRO-NANO-BIO-TECHNOLOGIES %~ INSA-GROUPE %~ TOULOUSE-INP %~ UNIV-UT3 %~ UT3-INP %~ UT3-TOULOUSEINP