Kinetic Monte Carlo for Process Simulation: First Principles Calibrated Parameters for BO 2
Résumé
The formation energies and diffusion paths of Oi, O2i and BO2 complex in silicon are determined using ab initio calculations and used to calibrate a Kinetic Monte Carlo. The aim is to simulate the formation of the BO2 complex in Technology Computer Aided Design tools.
Domaines
Physique [physics]| Origine | Fichiers produits par l'(les) auteur(s) |
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