@inproceedings{tabata:hal-03412643, TITLE = {{Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing}}, AUTHOR = {Tabata, Toshiyuki and Raynal, Pierre - Edouard and Roz{\'e}, Fabien and Halty, S{\'e}bastien and Thuries, Louis and Cristiano, Fuccio and Scheid, Emmanuel and Mazzamuto, Fulvio}, URL = {https://laas.hal.science/hal-03412643}, BOOKTITLE = {{IEEE International Interconnect Technology Conference (IITC 2021)}}, ADDRESS = {Kyoto (virtual), Japan}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 21352}, YEAR = {2021}, MONTH = Jul, DOI = {10.1109/IITC51362.2021.9537312}, KEYWORDS = {laser anneal ; Back End Of Line ; grain growth ; copper}, PDF = {https://laas.hal.science/hal-03412643/file/2021_IITC_Toshi%20Tabata.pdf}, HAL_ID = {hal-03412643}, HAL_VERSION = {v1}, }