MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
Conference Papers Year : 2021

MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia

Liviu Nicu
Gabor Molnar
Daisuke Saya
Karsten Haupt

Abstract

The integration of new advanced functional materials in the production chain of microelectromechanical systems (MEMS) requires a fundamental in-depth knowledge of their physical and chemical properties. In recent years, there has been a significant increase in publications reporting on performant transduction properties of classes of materials partially or completely unknown by the production chain mentioned above [1], [2]. These materials are generally synthesized and characterized in a form (powders, single crystals, etc.) that is not suitable for MEMS manufacturing processes, rather requiring homogeneous thin films. Thus, despite the announced performances, which are very convincing and promising, there is no guarantee that they can be easily integrated into MEMS devices, nor can there be any guarantee that their performances will be preserved once the integration phase is successful.
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Dates and versions

hal-03424049 , version 1 (10-11-2021)

Identifiers

  • HAL Id : hal-03424049 , version 1

Cite

Liviu Nicu, Susan Trolier-Mckinstry, Gabor Molnar, Azzedine Bousseksou, Maria Dolores Manrique-Juarez, et al.. MEMS-based platforms for characterization of advanced functional materials: from Substantia to Potentia. IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Apr 2021, Xiamen, China. ⟨hal-03424049⟩
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