@inproceedings{markovic:hal-03649053, TITLE = {{Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime}}, AUTHOR = {Markovic, Aleksandra and Pillonnet, Ga{\"e}l and Legrand, Bernard}, URL = {https://hal.laas.fr/hal-03649053}, BOOKTITLE = {{Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22}}, ADDRESS = {Paris, France}, ORGANIZATION = {{URSI}}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 22133}, YEAR = {2022}, MONTH = Mar, KEYWORDS = {Ultra-low power digital circuits ; adiabatic logic ; silicon MEMS ; comb-drive}, PDF = {https://hal.laas.fr/hal-03649053/file/Article_A.Markovic.pdf}, HAL_ID = {hal-03649053}, HAL_VERSION = {v1}, }