@inproceedings{demoulin:hal-03795894, TITLE = {{Failure Mode Analysis in Microsecond UV Laser Annealing of Cu Thin Films}}, AUTHOR = {Demoulin, R{\'e}mi and Daubriac, Richard and Thuries, Louis and Scheid, Emmanuel and Roz{\'e}, Fabien and Cristiano, Fuccio and Tabata, Toshiyuki and Mazzamuto, Fulvio}, URL = {https://laas.hal.science/hal-03795894}, BOOKTITLE = {{IEEE International Interconnect Technology Conference (IITC) 2022}}, ADDRESS = {San Jos{\'e}, California, United States}, HAL_LOCAL_REFERENCE = {Rapport LAAS n{\textdegree} 22324}, YEAR = {2022}, MONTH = Jun, DOI = {10.1109/iitc52079.2022.9881308}, KEYWORDS = {laser anneal ; BEOL ; copper}, PDF = {https://laas.hal.science/hal-03795894/file/2022_IITC_Demoulin_Tabata_proceedings.pdf}, HAL_ID = {hal-03795894}, HAL_VERSION = {v1}, }