<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-03867418</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-17T07:40:40+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework</title>
            <author role="aut">
              <persName>
                <forename type="first">P.L.</forename>
                <surname>Julliard</surname>
              </persName>
              <idno type="halauthorid">2120527-0</idno>
              <affiliation ref="#struct-458086"/>
              <affiliation ref="#struct-390153"/>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>Johnsson</surname>
              </persName>
              <idno type="halauthorid">1161962-0</idno>
              <affiliation ref="#struct-330453"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">N.</forename>
                <surname>Zographos</surname>
              </persName>
              <idno type="halauthorid">1457514-0</idno>
              <affiliation ref="#struct-300990"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">R.</forename>
                <surname>Demoulin</surname>
              </persName>
              <idno type="halauthorid">81615-0</idno>
              <affiliation ref="#struct-390153"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Richard</forename>
                <surname>Monflier</surname>
              </persName>
              <email type="md5">5e15726b5c0631fef9bd49bd97594fa5</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">richard-monflier</idno>
              <idno type="idhal" notation="numeric">9269</idno>
              <idno type="halauthorid" notation="string">30703-9269</idno>
              <idno type="IDREF">https://www.idref.fr/248700928</idno>
              <affiliation ref="#struct-389612"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">A.</forename>
                <surname>Jay</surname>
              </persName>
              <email type="md5">436b6c7c6d62a6938d984f3c967039ca</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">jay-antoine</idno>
              <idno type="idhal" notation="numeric">1185912</idno>
              <idno type="halauthorid" notation="string">385890-1185912</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-0361-5866</idno>
              <affiliation ref="#struct-458086"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">O.</forename>
                <surname>Er-Riyahi</surname>
              </persName>
              <idno type="halauthorid">2654622-0</idno>
              <affiliation ref="#struct-458086"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Monsieur</surname>
              </persName>
              <idno type="halauthorid">617856-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">S.</forename>
                <surname>Joblot</surname>
              </persName>
              <idno type="halauthorid">316256-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">F.</forename>
                <surname>Deprat</surname>
              </persName>
              <idno type="halauthorid">1533425-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">D.</forename>
                <surname>Rideau</surname>
              </persName>
              <idno type="halauthorid">100586-0</idno>
              <affiliation ref="#struct-23639"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">P.</forename>
                <surname>Pichler</surname>
              </persName>
              <idno type="halauthorid">199342-0</idno>
              <affiliation ref="#struct-330453"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Anne</forename>
                <surname>Hémeryck</surname>
              </persName>
              <email type="md5">6120bc0e583b73e250b4b894689b0f8f</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">anne-hemeryck</idno>
              <idno type="idhal" notation="numeric">10927</idno>
              <idno type="halauthorid" notation="string">32393-10927</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/A-8686-2017</idno>
              <idno type="ORCID">https://orcid.org/0000-0002-0201-1171</idno>
              <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=n_kj59UAAAAJ&amp;hl=fr</idno>
              <idno type="IDREF">https://www.idref.fr/139714030</idno>
              <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/A-8686-2017</idno>
              <affiliation ref="#struct-458086"/>
            </author>
            <author role="aut">
              <persName>
                <forename type="first">Fuccio</forename>
                <surname>Cristiano</surname>
              </persName>
              <email type="md5">af6295d29b424e08d65f75df67dca270</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">fuccio-cristiano</idno>
              <idno type="idhal" notation="numeric">3566</idno>
              <idno type="halauthorid" notation="string">4154-3566</idno>
              <idno type="ORCID">https://orcid.org/0000-0003-1839-9972</idno>
              <idno type="IDREF">https://www.idref.fr/078025923</idno>
              <affiliation ref="#struct-390153"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Anne</forename>
                <surname>Hemeryck</surname>
              </persName>
              <email type="md5">6120bc0e583b73e250b4b894689b0f8f</email>
              <email type="domain">laas.fr</email>
            </editor>
            <funder ref="#projeurop-713757"/>
            <funder>CALMIP-Grant P1555 et de TGCC-Genci AD010913556</funder>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2022-11-23 12:46:01</date>
              <date type="whenModified">2025-10-22 18:04:09</date>
              <date type="whenReleased">2022-11-23 14:04:55</date>
              <date type="whenProduced">2023-02</date>
              <date type="whenEndEmbargoed">2022-11-23</date>
              <ref type="file" target="https://laas.hal.science/hal-03867418v1/document">
                <date notBefore="2022-11-23"/>
              </ref>
              <ref type="file" subtype="author" n="1" target="https://laas.hal.science/hal-03867418v1/file/Julliard-SolidStateElectronic.pdf" id="file-3867418-3382161">
                <date notBefore="2022-11-23"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="200541">
                <persName>
                  <forename>Anne</forename>
                  <surname>Hemeryck</surname>
                </persName>
                <email type="md5">6120bc0e583b73e250b4b894689b0f8f</email>
                <email type="domain">laas.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-03867418</idno>
            <idno type="halUri">https://laas.hal.science/hal-03867418</idno>
            <idno type="halBibtex">julliard:hal-03867418</idno>
            <idno type="halRefHtml">&lt;i&gt;Solid-State Electronics&lt;/i&gt;, 2023, 200, pp.108521. &lt;a target="_blank" href="https://dx.doi.org/10.1016/j.sse.2022.108521"&gt;&amp;#x27E8;10.1016/j.sse.2022.108521&amp;#x27E9;&lt;/a&gt;</idno>
            <idno type="halRef">Solid-State Electronics, 2023, 200, pp.108521. &amp;#x27E8;10.1016/j.sse.2022.108521&amp;#x27E9;</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-3867418-3382161"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE2">Université Toulouse 2</idno>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-TOULOUSE">Institut National des Sciences Appliquées de Toulouse</idno>
            <idno type="stamp" n="LAAS">Laboratoire d'analyse et d'architecture des systèmes</idno>
            <idno type="stamp" n="OPENAIRE">OpenAIRE</idno>
            <idno type="stamp" n="UT1-CAPITOLE">Université Toulouse 1 Capitole</idno>
            <idno type="stamp" n="LAAS-MPN" corresp="LAAS-MICRO-NANO-BIO-TECHNOLOGIES">Équipe Matériaux et Procédés pour la Nanoélectronique</idno>
            <idno type="stamp" n="LAAS-I2C" corresp="LAAS">Service Instrumentation Conception Caractérisation</idno>
            <idno type="stamp" n="LAAS-MICRO-NANO-BIO-TECHNOLOGIES" corresp="LAAS">LAAS-Micro Nano Bio Technologies</idno>
            <idno type="stamp" n="GENCI">Publications ayant eu recours aux supercalculateurs du GENCI</idno>
            <idno type="stamp" n="LAAS-NANOMATERIAUX">Nanomatériaux, nanofluidique et instrumentation distribuée pour la surveillance</idno>
            <idno type="stamp" n="LAAS-M3" corresp="LAAS-MICRO-NANO-BIO-TECHNOLOGIES">Équipe Modélisation Multi-niveaux des Matériaux</idno>
            <idno type="stamp" n="LAAS-SYSTEMES-COMPLEXES" corresp="LAAS">Technologie et Instrumentation pour le monitoring de systèmes complexes</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="TEST7-HALCNRS">test 7 du portail hal cnrs</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Prediction of the evolution of defects induced by the heated implantation process: Contribution of kinetic Monte Carlo in a multi-scale modeling framework</title>
                <author role="aut">
                  <persName>
                    <forename type="first">P.L.</forename>
                    <surname>Julliard</surname>
                  </persName>
                  <idno type="halauthorid">2120527-0</idno>
                  <affiliation ref="#struct-458086"/>
                  <affiliation ref="#struct-390153"/>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>Johnsson</surname>
                  </persName>
                  <idno type="halauthorid">1161962-0</idno>
                  <affiliation ref="#struct-330453"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">N.</forename>
                    <surname>Zographos</surname>
                  </persName>
                  <idno type="halauthorid">1457514-0</idno>
                  <affiliation ref="#struct-300990"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">R.</forename>
                    <surname>Demoulin</surname>
                  </persName>
                  <idno type="halauthorid">81615-0</idno>
                  <affiliation ref="#struct-390153"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Richard</forename>
                    <surname>Monflier</surname>
                  </persName>
                  <email type="md5">5e15726b5c0631fef9bd49bd97594fa5</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">richard-monflier</idno>
                  <idno type="idhal" notation="numeric">9269</idno>
                  <idno type="halauthorid" notation="string">30703-9269</idno>
                  <idno type="IDREF">https://www.idref.fr/248700928</idno>
                  <affiliation ref="#struct-389612"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">A.</forename>
                    <surname>Jay</surname>
                  </persName>
                  <email type="md5">436b6c7c6d62a6938d984f3c967039ca</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">jay-antoine</idno>
                  <idno type="idhal" notation="numeric">1185912</idno>
                  <idno type="halauthorid" notation="string">385890-1185912</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-0361-5866</idno>
                  <affiliation ref="#struct-458086"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">O.</forename>
                    <surname>Er-Riyahi</surname>
                  </persName>
                  <idno type="halauthorid">2654622-0</idno>
                  <affiliation ref="#struct-458086"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Monsieur</surname>
                  </persName>
                  <idno type="halauthorid">617856-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">S.</forename>
                    <surname>Joblot</surname>
                  </persName>
                  <idno type="halauthorid">316256-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">F.</forename>
                    <surname>Deprat</surname>
                  </persName>
                  <idno type="halauthorid">1533425-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">D.</forename>
                    <surname>Rideau</surname>
                  </persName>
                  <idno type="halauthorid">100586-0</idno>
                  <affiliation ref="#struct-23639"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">P.</forename>
                    <surname>Pichler</surname>
                  </persName>
                  <idno type="halauthorid">199342-0</idno>
                  <affiliation ref="#struct-330453"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Anne</forename>
                    <surname>Hémeryck</surname>
                  </persName>
                  <email type="md5">6120bc0e583b73e250b4b894689b0f8f</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">anne-hemeryck</idno>
                  <idno type="idhal" notation="numeric">10927</idno>
                  <idno type="halauthorid" notation="string">32393-10927</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/A-8686-2017</idno>
                  <idno type="ORCID">https://orcid.org/0000-0002-0201-1171</idno>
                  <idno type="GOOGLE SCHOLAR">https://scholar.google.fr/citations?user=n_kj59UAAAAJ&amp;hl=fr</idno>
                  <idno type="IDREF">https://www.idref.fr/139714030</idno>
                  <idno type="RESEARCHERID">http://www.researcherid.com/rid/http://www.researcherid.com/rid/A-8686-2017</idno>
                  <affiliation ref="#struct-458086"/>
                </author>
                <author role="aut">
                  <persName>
                    <forename type="first">Fuccio</forename>
                    <surname>Cristiano</surname>
                  </persName>
                  <email type="md5">af6295d29b424e08d65f75df67dca270</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">fuccio-cristiano</idno>
                  <idno type="idhal" notation="numeric">3566</idno>
                  <idno type="halauthorid" notation="string">4154-3566</idno>
                  <idno type="ORCID">https://orcid.org/0000-0003-1839-9972</idno>
                  <idno type="IDREF">https://www.idref.fr/078025923</idno>
                  <affiliation ref="#struct-390153"/>
                </author>
              </analytic>
              <monogr>
                <idno type="localRef">Rapport LAAS n° 22421</idno>
                <idno type="halJournalId" status="VALID">8581</idno>
                <idno type="issn">0038-1101</idno>
                <title level="j">Solid-State Electronics</title>
                <imprint>
                  <publisher>Elsevier</publisher>
                  <biblScope unit="volume">200</biblScope>
                  <biblScope unit="pp">108521</biblScope>
                  <date type="datePub">2023-02</date>
                  <date type="dateEpub">2022-11-22</date>
                </imprint>
              </monogr>
              <idno type="doi">10.1016/j.sse.2022.108521</idno>
              <ref type="publisher">https://www.sciencedirect.com/science/article/pii/S0038110122002921?via%3Dihub</ref>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <keywords scheme="author">
                <term xml:lang="en">Kinetic Monte Carlo</term>
                <term xml:lang="en">Process simulations</term>
                <term xml:lang="en">Heated implantation</term>
                <term xml:lang="en">Multi-scale modeling</term>
              </keywords>
              <classCode scheme="halDomain" n="spi.tron">Engineering Sciences [physics]/Electronics</classCode>
              <classCode scheme="halTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halOldTypology" n="ART">Journal articles</classCode>
              <classCode scheme="halTreeTypology" n="ART">Journal articles</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>Extended defects formed as a result of heated implantation and thermal annealing are studied using transmission electron microscopy and kinetic Monte Carlo simulations. We highlight the relevance of using kinetic Monte Carlo approach to provide information to continuum-scale simulations as well as the value of integrating data from atomic-scale calculations for its calibration.</p>
            </abstract>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="researchteam" xml:id="struct-458086" status="OLD">
          <orgName>Équipe Modélisation Multi-niveaux des Matériaux</orgName>
          <orgName type="acronym">LAAS-M3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/m3</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="researchteam" xml:id="struct-390153" status="OLD">
          <orgName>Équipe Matériaux et Procédés pour la Nanoélectronique</orgName>
          <orgName type="acronym">LAAS-MPN</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/mpn</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-23639" status="VALID">
          <orgName>STMicroelectronics [Crolles]</orgName>
          <orgName type="acronym">ST-CROLLES</orgName>
          <desc>
            <address>
              <addrLine>850 rue Jean Monnet BP 16 38926 Crolles</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.st.com</ref>
          </desc>
        </org>
        <org type="regroupinstitution" xml:id="struct-330453" status="VALID">
          <idno type="ISNI">0000 0000 9261 3939</idno>
          <idno type="ROR">https://ror.org/05hkkdn48</idno>
          <orgName>Fraunhofer</orgName>
          <orgName type="acronym">Fraunhofer-Gesellschaft</orgName>
          <desc>
            <address>
              <addrLine>Hansastraße 27c, 80686 München</addrLine>
              <country key="DE"/>
            </address>
            <ref type="url">https://www.fraunhofer.de/en.html</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-300990" status="VALID">
          <orgName>Synopsys Inc.</orgName>
          <desc>
            <address>
              <country key="US"/>
            </address>
          </desc>
        </org>
        <org type="researchteam" xml:id="struct-389612" status="OLD">
          <orgName>Service Instrumentation Conception Caractérisation</orgName>
          <orgName type="acronym">LAAS-I2C</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/i2c</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-459" status="OLD">
          <idno type="IdRef">199278792</idno>
          <idno type="ISNI">0000 0001 2188 216X </idno>
          <idno type="RNSR">199517454Y</idno>
          <idno type="ROR">https://ror.org/03vcm6439</idno>
          <orgName>Laboratoire d'analyse et d'architecture des systèmes</orgName>
          <orgName type="acronym">LAAS</orgName>
          <date type="start">1968-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>7 Av du colonel Roche 31077 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laas.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-81148" type="direct"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation name="UPR8001" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-81148" status="VALID">
          <idno type="IdRef">026404354</idno>
          <idno type="ISNI">0000000121902837</idno>
          <idno type="ROR">https://ror.org/0443n9e75</idno>
          <orgName>Université Toulouse Capitole</orgName>
          <orgName type="acronym">UT Capitole</orgName>
          <date type="start">1970-01-01</date>
          <desc>
            <address>
              <addrLine>2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ut-capitole.fr/</ref>
          </desc>
          <listRelation>
            <relation name="443875" active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116255" status="VALID">
          <idno type="IdRef">026388766</idno>
          <idno type="ISNI">0000 0001 2286 8343</idno>
          <idno type="ROR">https://ror.org/01h8pf755</idno>
          <idno type="Wikidata">Q858979</idno>
          <orgName>Institut National des Sciences Appliquées - Toulouse</orgName>
          <orgName type="acronym">INSA Toulouse</orgName>
          <date type="start">1963-10-21</date>
          <desc>
            <address>
              <addrLine>135, avenue de Rangueil - 31077 Toulouse cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-toulouse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116256" status="VALID">
          <idno type="IdRef">026403994</idno>
          <idno type="ROR">https://ror.org/04ezk3x31</idno>
          <orgName>Université Toulouse - Jean Jaurès</orgName>
          <orgName type="acronym">UT2J</orgName>
          <date type="start">1971-01-01</date>
          <desc>
            <address>
              <addrLine>5 allées Antonio Machado - 31058 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
      <listOrg type="projects">
        <org type="europeanProject" xml:id="projeurop-713757" status="VALID">
          <idno type="number">871813</idno>
          <idno type="program">H2020-ICT-2018-20</idno>
          <idno type="call">H2020-ICT-2019-2</idno>
          <orgName>MUNDFAB</orgName>
          <desc>Modeling Unconventional Nanoscaled Device FABrication</desc>
          <date type="start">2020-01-01</date>
          <date type="end">2023-06-30</date>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>