<?xml version="1.0" encoding="utf-8"?>
<TEI xmlns="http://www.tei-c.org/ns/1.0" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:hal="http://hal.archives-ouvertes.fr/" xmlns:gml="http://www.opengis.net/gml/3.3/" xmlns:gmlce="http://www.opengis.net/gml/3.3/ce" version="1.1" xsi:schemaLocation="http://www.tei-c.org/ns/1.0 http://api.archives-ouvertes.fr/documents/aofr-sword.xsd">
  <teiHeader>
    <fileDesc>
      <titleStmt>
        <title>HAL TEI export of hal-04131044</title>
      </titleStmt>
      <publicationStmt>
        <distributor>CCSD</distributor>
        <availability status="restricted">
          <licence target="https://creativecommons.org/publicdomain/zero/1.0/">CC0 1.0 - Universal</licence>
        </availability>
        <date when="2026-05-23T02:30:51+02:00"/>
      </publicationStmt>
      <sourceDesc>
        <p part="N">HAL API Platform</p>
      </sourceDesc>
    </fileDesc>
  </teiHeader>
  <text>
    <body>
      <listBibl>
        <biblFull>
          <titleStmt>
            <title xml:lang="en">Chip or Wafer -Small quantity fabrication</title>
            <author role="aut">
              <persName>
                <forename type="first">Shun</forename>
                <surname>Yasunaga</surname>
              </persName>
              <email type="md5">c28f8746d4d30e6720eff5f9b1bb8db3</email>
              <email type="domain">ee.t.u-tokyo.ac.jp</email>
              <idno type="idhal" notation="numeric">1262555</idno>
              <idno type="halauthorid" notation="string">2838746-1262555</idno>
              <affiliation ref="#struct-304304"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">David</forename>
                <surname>Bourrier</surname>
              </persName>
              <email type="md5">ab3fd76f392f505e835200d24a64d1e6</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">david-bourrier</idno>
              <idno type="idhal" notation="numeric">5513</idno>
              <idno type="halauthorid" notation="string">17177-5513</idno>
              <affiliation ref="#struct-389044"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">Naonobu</forename>
                <surname>Shimamoto</surname>
              </persName>
              <email type="md5">cc379c7de22ebe0e6f1f07f45f68c20d</email>
              <email type="domain">if.t.u-tokyo.ac.jp</email>
              <idno type="idhal" notation="numeric">1262536</idno>
              <idno type="halauthorid" notation="string">2838757-1262536</idno>
              <affiliation ref="#struct-304304"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">Ayako</forename>
                <surname>Mizushima</surname>
              </persName>
              <email type="md5">72b7d34a0b34d0a2edde9b7c9a0793c4</email>
              <email type="domain">if.t.u-tokyo.ac.jp</email>
              <idno type="idhal" notation="numeric">1262537</idno>
              <idno type="halauthorid" notation="string">1599840-1262537</idno>
              <affiliation ref="#struct-304304"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">Hugues</forename>
                <surname>Granier</surname>
              </persName>
              <email type="md5">0aedc8d6971cd445ec8d2df6374689b4</email>
              <email type="domain">laas.fr</email>
              <idno type="idhal" notation="string">hugues-granier</idno>
              <idno type="idhal" notation="numeric">13210</idno>
              <idno type="halauthorid" notation="string">4408-13210</idno>
              <affiliation ref="#struct-389044"/>
            </author>
            <author role="crp">
              <persName>
                <forename type="first">Yoshio</forename>
                <surname>Mita</surname>
              </persName>
              <email type="md5">0265c2b17ef7de2b738f076ecf7ae2be</email>
              <email type="domain">ee.t.u-tokyo.ac.jp</email>
              <idno type="idhal" notation="numeric">1262538</idno>
              <idno type="halauthorid" notation="string">217926-1262538</idno>
              <affiliation ref="#struct-304304"/>
            </author>
            <editor role="depositor">
              <persName>
                <forename>Hugues</forename>
                <surname>Granier</surname>
              </persName>
              <email type="md5">0aedc8d6971cd445ec8d2df6374689b4</email>
              <email type="domain">laas.fr</email>
            </editor>
          </titleStmt>
          <editionStmt>
            <edition n="v1" type="current">
              <date type="whenSubmitted">2023-06-16 13:45:07</date>
              <date type="whenModified">2026-02-07 05:25:33</date>
              <date type="whenReleased">2023-06-20 10:27:35</date>
              <date type="whenProduced">2023-05-15</date>
              <ref type="annex" n="0" target="https://laas.hal.science/hal-04131044v1/file/abstract_ENRIS2023_yasunaga_v2.pdf" id="file-4131044-3598940">
                <date notBefore="2023-06-16"/>
              </ref>
            </edition>
            <respStmt>
              <resp>contributor</resp>
              <name key="436185">
                <persName>
                  <forename>Hugues</forename>
                  <surname>Granier</surname>
                </persName>
                <email type="md5">0aedc8d6971cd445ec8d2df6374689b4</email>
                <email type="domain">laas.fr</email>
              </name>
            </respStmt>
          </editionStmt>
          <publicationStmt>
            <distributor>CCSD</distributor>
            <idno type="halId">hal-04131044</idno>
            <idno type="halUri">https://laas.hal.science/hal-04131044</idno>
            <idno type="halBibtex">yasunaga:hal-04131044</idno>
            <idno type="halRefHtml">&lt;i&gt;3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023&lt;/i&gt;, Renatech Euronanolab, May 2023, Paris Saclay, France</idno>
            <idno type="halRef">3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023, Renatech Euronanolab, May 2023, Paris Saclay, France</idno>
            <availability status="restricted">
              <licence target="https://about.hal.science/hal-authorisation-v1/">HAL Authorization<ref corresp="#file-4131044-3598940"/></licence>
            </availability>
          </publicationStmt>
          <seriesStmt>
            <idno type="stamp" n="UNIV-TLSE2">Université Toulouse 2</idno>
            <idno type="stamp" n="UNIV-TLSE3">Université de Toulouse</idno>
            <idno type="stamp" n="CNRS">CNRS - Centre national de la recherche scientifique</idno>
            <idno type="stamp" n="INSA-TOULOUSE">Institut National des Sciences Appliquées de Toulouse</idno>
            <idno type="stamp" n="LAAS">Laboratoire d'analyse et d'architecture des systèmes</idno>
            <idno type="stamp" n="UT1-CAPITOLE">Université Toulouse 1 Capitole</idno>
            <idno type="stamp" n="LAAS-TEAM" corresp="LAAS">Service Techniques et Équipements Appliqués à la Microélectronique</idno>
            <idno type="stamp" n="INSA-GROUPE">Groupe INSA</idno>
            <idno type="stamp" n="TOULOUSE-INP">Toulouse - INP</idno>
            <idno type="stamp" n="UNIV-UT3">Université Toulouse 3</idno>
            <idno type="stamp" n="UT3-INP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="UT3-TOULOUSEINP">Université de Toulouse / Toulouse INP</idno>
            <idno type="stamp" n="TEST7-HALCNRS">test 7 du portail hal cnrs</idno>
            <idno type="stamp" n="RENATECH">RENATECH</idno>
          </seriesStmt>
          <notesStmt>
            <note type="audience" n="2">International</note>
            <note type="invited" n="0">No</note>
            <note type="popular" n="0">No</note>
            <note type="peer" n="1">Yes</note>
            <note type="proceedings" n="1">Yes</note>
          </notesStmt>
          <sourceDesc>
            <biblStruct>
              <analytic>
                <title xml:lang="en">Chip or Wafer -Small quantity fabrication</title>
                <author role="aut">
                  <persName>
                    <forename type="first">Shun</forename>
                    <surname>Yasunaga</surname>
                  </persName>
                  <email type="md5">c28f8746d4d30e6720eff5f9b1bb8db3</email>
                  <email type="domain">ee.t.u-tokyo.ac.jp</email>
                  <idno type="idhal" notation="numeric">1262555</idno>
                  <idno type="halauthorid" notation="string">2838746-1262555</idno>
                  <affiliation ref="#struct-304304"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">David</forename>
                    <surname>Bourrier</surname>
                  </persName>
                  <email type="md5">ab3fd76f392f505e835200d24a64d1e6</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">david-bourrier</idno>
                  <idno type="idhal" notation="numeric">5513</idno>
                  <idno type="halauthorid" notation="string">17177-5513</idno>
                  <affiliation ref="#struct-389044"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">Naonobu</forename>
                    <surname>Shimamoto</surname>
                  </persName>
                  <email type="md5">cc379c7de22ebe0e6f1f07f45f68c20d</email>
                  <email type="domain">if.t.u-tokyo.ac.jp</email>
                  <idno type="idhal" notation="numeric">1262536</idno>
                  <idno type="halauthorid" notation="string">2838757-1262536</idno>
                  <affiliation ref="#struct-304304"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">Ayako</forename>
                    <surname>Mizushima</surname>
                  </persName>
                  <email type="md5">72b7d34a0b34d0a2edde9b7c9a0793c4</email>
                  <email type="domain">if.t.u-tokyo.ac.jp</email>
                  <idno type="idhal" notation="numeric">1262537</idno>
                  <idno type="halauthorid" notation="string">1599840-1262537</idno>
                  <affiliation ref="#struct-304304"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">Hugues</forename>
                    <surname>Granier</surname>
                  </persName>
                  <email type="md5">0aedc8d6971cd445ec8d2df6374689b4</email>
                  <email type="domain">laas.fr</email>
                  <idno type="idhal" notation="string">hugues-granier</idno>
                  <idno type="idhal" notation="numeric">13210</idno>
                  <idno type="halauthorid" notation="string">4408-13210</idno>
                  <affiliation ref="#struct-389044"/>
                </author>
                <author role="crp">
                  <persName>
                    <forename type="first">Yoshio</forename>
                    <surname>Mita</surname>
                  </persName>
                  <email type="md5">0265c2b17ef7de2b738f076ecf7ae2be</email>
                  <email type="domain">ee.t.u-tokyo.ac.jp</email>
                  <idno type="idhal" notation="numeric">1262538</idno>
                  <idno type="halauthorid" notation="string">217926-1262538</idno>
                  <affiliation ref="#struct-304304"/>
                </author>
              </analytic>
              <monogr>
                <idno type="localRef">Rapport LAAS n° 23174</idno>
                <meeting>
                  <title>3rd European Symposium on Nanofabrication Research Infrastructure - ENRIS 2023</title>
                  <date type="start">2023-05-15</date>
                  <date type="end">2023-05-17</date>
                  <settlement>Paris Saclay</settlement>
                  <country key="FR">France</country>
                </meeting>
                <respStmt>
                  <resp>conferenceOrganizer</resp>
                  <name>Renatech Euronanolab</name>
                </respStmt>
                <imprint>
                  <date type="datePub">2023-05</date>
                </imprint>
              </monogr>
            </biblStruct>
          </sourceDesc>
          <profileDesc>
            <langUsage>
              <language ident="en">English</language>
            </langUsage>
            <textClass>
              <classCode scheme="halDomain" n="spi">Engineering Sciences [physics]</classCode>
              <classCode scheme="halTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halOldTypology" n="COMM">Conference papers</classCode>
              <classCode scheme="halTreeTypology" n="COMM">Conference papers</classCode>
            </textClass>
            <abstract xml:lang="en">
              <p>In the academic research activities in the cleanroom, where mass production is rarely required or substrate to be processed is sometimes limited in size, devices are often fabricated using diced chips rather than wafers. However, such fabrication often struggles to maintain quality, in part because of inhomogeneity on the small chip and the different chip size among users, which requires process optimization for each. One possible solution is to standardize processing chips attached to or embedded in a dummy wafer.</p>
            </abstract>
            <particDesc>
              <org type="ir" xml:id="fr-esr-fdr-ir-097">
                <orgName type="acronym">RENATECH+</orgName>
                <idno type="wikidata">Q33121910</idno>
              </org>
            </particDesc>
          </profileDesc>
        </biblFull>
      </listBibl>
    </body>
    <back>
      <listOrg type="structures">
        <org type="regroupinstitution" xml:id="struct-304304" status="VALID">
          <idno type="IdRef">029909848</idno>
          <idno type="ROR">https://ror.org/057zh3y96</idno>
          <orgName>The University of Tokyo</orgName>
          <orgName type="acronym">UTokyo</orgName>
          <desc>
            <address>
              <addrLine>7 Chome-3-1 Hongo, Bunkyo, Tokyo 113-8654</addrLine>
              <country key="JP"/>
            </address>
            <ref type="url">https://www.u-tokyo.ac.jp/en/</ref>
          </desc>
        </org>
        <org type="researchteam" xml:id="struct-389044" status="OLD">
          <orgName>Service Techniques et Équipements Appliqués à la Microélectronique</orgName>
          <orgName type="acronym">LAAS-TEAM</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.laas.fr/public/fr/team</ref>
          </desc>
          <listRelation>
            <relation active="#struct-459" type="direct"/>
            <relation active="#struct-81148" type="indirect"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="indirect"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="indirect"/>
            <relation active="#struct-217752" type="indirect"/>
            <relation name="UPR8001" active="#struct-441569" type="indirect"/>
            <relation active="#struct-448187" type="indirect"/>
          </listRelation>
        </org>
        <org type="laboratory" xml:id="struct-459" status="OLD">
          <idno type="IdRef">199278792</idno>
          <idno type="ISNI">0000 0001 2188 216X </idno>
          <idno type="RNSR">199517454Y</idno>
          <idno type="ROR">https://ror.org/03vcm6439</idno>
          <orgName>Laboratoire d'analyse et d'architecture des systèmes</orgName>
          <orgName type="acronym">LAAS</orgName>
          <date type="start">1968-01-01</date>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>7 Av du colonel Roche 31077 TOULOUSE CEDEX 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.laas.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-81148" type="direct"/>
            <relation name="443875" active="#struct-443875" type="indirect"/>
            <relation active="#struct-116255" type="direct"/>
            <relation active="#struct-301232" type="indirect"/>
            <relation active="#struct-443875" type="indirect"/>
            <relation active="#struct-116256" type="direct"/>
            <relation active="#struct-217752" type="direct"/>
            <relation name="UPR8001" active="#struct-441569" type="direct"/>
            <relation active="#struct-448187" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-81148" status="VALID">
          <idno type="IdRef">026404354</idno>
          <idno type="ISNI">0000000121902837</idno>
          <idno type="ROR">https://ror.org/0443n9e75</idno>
          <orgName>Université Toulouse Capitole</orgName>
          <orgName type="acronym">UT Capitole</orgName>
          <date type="start">1970-01-01</date>
          <desc>
            <address>
              <addrLine>2 rue du Doyen-Gabriel-Marty - 31042 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.ut-capitole.fr/</ref>
          </desc>
          <listRelation>
            <relation name="443875" active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-443875" status="VALID">
          <idno type="ROR">https://ror.org/017tgbk05</idno>
          <orgName>Communauté d'universités et établissements de Toulouse</orgName>
          <orgName type="acronym">Comue de Toulouse</orgName>
          <desc>
            <address>
              <addrLine>41 Allée Jules Guesde, 31000 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.univ-toulouse.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116255" status="VALID">
          <idno type="IdRef">026388766</idno>
          <idno type="ISNI">0000 0001 2286 8343</idno>
          <idno type="ROR">https://ror.org/01h8pf755</idno>
          <idno type="Wikidata">Q858979</idno>
          <orgName>Institut National des Sciences Appliquées - Toulouse</orgName>
          <orgName type="acronym">INSA Toulouse</orgName>
          <date type="start">1963-10-21</date>
          <desc>
            <address>
              <addrLine>135, avenue de Rangueil - 31077 Toulouse cedex 4</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.insa-toulouse.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-301232" type="direct"/>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-301232" status="VALID">
          <idno type="IdRef">162105150</idno>
          <orgName>Institut National des Sciences Appliquées</orgName>
          <orgName type="acronym">INSA</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
          </desc>
        </org>
        <org type="institution" xml:id="struct-116256" status="VALID">
          <idno type="IdRef">026403994</idno>
          <idno type="ROR">https://ror.org/04ezk3x31</idno>
          <orgName>Université Toulouse - Jean Jaurès</orgName>
          <orgName type="acronym">UT2J</orgName>
          <date type="start">1971-01-01</date>
          <desc>
            <address>
              <addrLine>5 allées Antonio Machado - 31058 Toulouse Cedex 9</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse2.fr</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="institution" xml:id="struct-217752" status="OLD">
          <idno type="IdRef">026404672</idno>
          <idno type="ISNI">0000000121617331</idno>
          <idno type="ROR">https://ror.org/02v6kpv12</idno>
          <idno type="Wikidata">Q1273188</idno>
          <orgName>Université Toulouse III - Paul Sabatier</orgName>
          <orgName type="acronym">UT3</orgName>
          <date type="end">2025-01-01</date>
          <desc>
            <address>
              <addrLine>118 route de Narbonne - 31062 Toulouse</addrLine>
              <country key="FR"/>
            </address>
            <ref type="url">http://www.univ-tlse3.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
        <org type="regroupinstitution" xml:id="struct-441569" status="VALID">
          <idno type="IdRef">02636817X</idno>
          <idno type="ISNI">0000000122597504</idno>
          <idno type="ROR">https://ror.org/02feahw73</idno>
          <orgName>Centre National de la Recherche Scientifique</orgName>
          <orgName type="acronym">CNRS</orgName>
          <date type="start">1939-10-19</date>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.cnrs.fr/</ref>
          </desc>
        </org>
        <org type="institution" xml:id="struct-448187" status="VALID">
          <idno type="IdRef">026388820</idno>
          <idno type="ISNI">0000000121766169</idno>
          <idno type="ROR">https://ror.org/033p9g875</idno>
          <orgName>Institut National Polytechnique (Toulouse)</orgName>
          <orgName type="acronym">Toulouse INP</orgName>
          <desc>
            <address>
              <country key="FR"/>
            </address>
            <ref type="url">https://www.inp-toulouse.fr/</ref>
          </desc>
          <listRelation>
            <relation active="#struct-443875" type="direct"/>
          </listRelation>
        </org>
      </listOrg>
    </back>
  </text>
</TEI>