Microdevices for healthcare applications fabricated through clean room processes are emerging on the clinical market. Indeed, the low cost per device induced by this way of fabrication will benefit patients by making available high-end technology at lower costs. In this field, our project aims at developing a micro- perforated membrane for capturing circulating tumoral cells (CTCs) in a 1mL sample of whole blood without any labelling technique together with the electrical integrated detection of the captured cells. Selective cell trapping can be achieved through either specific cell biological properties (immunoaffinity), or their physical properties: size and deformability [1]. On the other hand, the detection of cells using their dielectric properties have been studied and it has been already shown that impedance spectroscopy is a reliable method for cell detection and characterization [2]. This contribution presents the fabrication process of a micro-perforated membrane device coupling the label-free physical trapping mechanism with a label-free detection method using specifically designed micro-electrodes for impedance spectroscopy. Dedicated experiments are shown, demonstrating the ability of capture and cell detection during the filtration of a whole blood microvolume. The fabrication principle of the microdevice is based on a six-layer process including thermal oxidation, UV photolithography, vapor phase deposition, electrolytical growth, reactive ion etching (RIE) and wet chemical etching. The microdevice finally exhibits three key parts: the filtering micro-perforated membrane, the gold micro-electrodes, and the supporting structure. The filtering membrane is made of a bilayer of SiO2 and Si3N4 respectively obtained through thermal oxidation of silicon and Low-Pressure Chemical Vapor Deposition (LPCVD). This membrane is perforated with micro-holes using RIE (CHF3 and O2), thus forming the thin filtering membrane. A metal layer of chrome and gold is deposited on the membrane using vacuum evaporation. This metal layer is used first as a seed layer for electrochemical thickening of the contact pads, it is then etched using RIE to pattern the micro-electrodes. Finally, an electrolytical growth of Nickel forms the fluidic channel and the supporting part, allowing easy handling of the membrane. The silicon substrate is chemically etched using tetramethylammonium hydroxide (TMAH) to release the microdevices. Figure 1 shows typical images of fabricated micro-devices, exhibiting the whole structure with the supporting Ni parts and the thin micro-perforated membrane (a) and two designs of interdigitated sensing micro-electrodes integrated at the surface of the micro-perforated membrane (b and c). A holder was fabricated to maintain the microdevice in-between two biocompatible machined parts. This holder is embedded in a microfluidic system which uses a peristaltic pump to flow solutions of interest, it is also connected to an impedance analyzer which records impedance spectra in a range of frequency between 1kHz and 5MHz. Experiments consisted in the recirculation of the sample through the microdevice in closed loop for 10 minutes while recording impedance spectra every two minutes. These experiments were carried out with a control sample of Phosphate Buffered Saline (PBS) and whole blood samples were collected from healthy donnors. Figure 2 shows the evolution of impedance spectra measured during the recirculation of blood samples. On the left side the evolution of the spectrum before filtration (blue) and after 2min and 10 min of filtration (respectively red and yellow) shows a large variation of impedance in the 1MHz region. The time evolution of the impedance at 1MHz on two typical devices is shown in the middle. On the right side the variations of impedance at 1MHz in blood (43-46%) are compared to PBS sample (1-7%). Optical monitoring of the membranes after the experiments with the blood samples exhibited cellular elements when only saline residues were visible on the membranes that filtered the PBS control solution. All together these experiments indicate that blood cells (white blood cells) can be captured by the pores of the membrane and that the integrated micro-electrodes detect cell trapping events.