Conference Papers
Year : 2024
Jonas Müller : Connect in order to contact the contributor
https://laas.hal.science/hal-04714304
Submitted on : Monday, September 30, 2024-11:38:14 AM
Last modification on : Thursday, October 10, 2024-5:09:01 PM
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- HAL Id : hal-04714304 , version 1
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Jonas Müller, Nicolas Mallet, Rémi Demoulin, Leonardo Cancellara, Aurélie Lecestre, et al.. Understanding and control of the formation of metallic nanoscale silicide contacts on vertical nanostructured channel for advanced 3D nanoelectronics devices: from Si to high mobility materials. E-MRS Fall 2024, Sep 2024, Warsaw, Poland. ⟨hal-04714304⟩
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