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Copper Large-scale Grain Growth by UV Nanosecond Pulsed Laser Annealing

Toshiyuki Tabata , Pierre - Edouard Raynal , Fabien Rozé , Sébastien Halty , Louis Thuries , et al.
IEEE International Interconnect Technology Conference (IITC 2021), Jul 2021, Kyoto (virtual), Japan. ⟨10.1109/IITC51362.2021.9537312⟩
Conference papers hal-03412643v1