Driving and sensing M/NEMS flexural vibration using dielectric transduction
Cécile Fuinel
,
Fabrice Mathieu
,
Bernard Legrand
31st International Conference EUROSENSORS, EUROSENSORS 2017 , Sep 2017, Paris, France
Conference papers
hal-01962981v1
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Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications
Olivier Thomas
,
Bernard Legrand
,
Cécile Fuinel
ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015) , Sep 2015, Colorado Springs, United States. 9p.,
⟨10.1115/SMASIS2015-8857⟩
Conference papers
hal-01203144v1
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Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors
Lucien Schwab
,
Pierre Etienne E Allain
,
L Banniard
,
A Fafin
,
Marc Gely
,
et al.
64th International Electron Devices Meeting (IEDM 2018) , IEEE, Dec 2018, San Francisco, United States
Conference papers
hal-01963015v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide
Laurent Mazenq
,
Lucien Schwab
,
Nicolas Mauran
,
Denis Lagrange
,
Xavier Dollat
,
et al.
[Rapport Technique] LAAS-CNRS. 2019
Reports
hal-03603368v1
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Design and measurement of AFM probe based on MEMS resonator
Zhuang Xiong
,
Bernard Legrand
Journal articles
hal-01961045v1
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High Speed Atomic Force Microscope
Nicolas Mauran
,
Denis Lagrange
,
Xavier Dollat
,
Laurent Mazenq
,
Lucien Schwab
,
et al.
NI-Week 2017 , May 2017, Austin, TX, United States.
, 2017
Poster communications
hal-01529673v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
Cécile Fuinel
,
Khadim Daffé
,
Adrian Laborde
,
Olivier Thomas
,
Laurent Mazenq
,
et al.
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016) , IEEE, Jan 2016, Shanghai, China.
⟨10.1109/MEMSYS.2016.7421850⟩
Conference papers
hal-01279717v1
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Optomechanical resonating probe for very high frequency sensing of atomic forces
Pierre Etienne Allain
,
Lucien Schwab
,
Colin Mismer
,
Marc Gely
,
Estelle Mairiaux
,
et al.
Journal articles
hal-02997481v1
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Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction
Adhitya Bhaswara
,
Hohyun Keum
,
Fabrice Mathieu
,
Bernard Legrand
,
Seok Kim
,
et al.
42nd International Conference on Micro and Nano Engineering, MNE 2016 , Sep 2016, Vienne, Austria
Conference papers
hal-01962410v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures
Olivier Thomas
,
Arthur Givois
,
Aurélien Grolet
,
Jean-François Deü
,
Cécile Fuinel
,
et al.
EUROMECH Colloquium 603, Dynamics of micro and nano systems , Sep 2018, Porto, Portugal
Conference papers
hal-01962993v1
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A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes
Adhitya Bhaswara
,
Hohyun Keum
,
Fabrice Mathieu
,
Bernard Legrand
,
Seok Kim
,
et al.
Journal articles
hal-01960876v1
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MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors
Bernard Legrand
,
Lucien Schwab
,
Pierre Allain
,
Ivan Favero
,
Marc Faucher
,
et al.
AVS 65th International Symposium & Exhibition , American Vacuum Society, Oct 2018, Long Beach, United States
Conference papers
hal-01908666v1
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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection
Zhuang Xiong
,
Estelle Mairiaux
,
Benjamin Walter
,
Marc Faucher
,
Lionel Buchaillot
,
et al.
Journal articles
hal-01960848v1
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Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry
Fei Wang
,
Damien Ducatteau
,
David Troadec
,
Hassan Tanbakuchi
,
Bernard Legrand
,
et al.
European Conference on Electrical Measurements at the Nanoscale Using AFM , Jun 2014, Cambridge, United Kingdom
Conference papers
hal-01962209v1
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Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes
Denis Lagrange
,
Nicolas Mauran
,
Lucien Schwab
,
Bernard Legrand
Journal articles
hal-02974151v1
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Determination of the effective mass and stiffness of a micro resonator from a single optical characterization
Adhitya Bhaswara
,
Denis Dezest
,
Liviu Nicu
,
Thierry Leichle
,
Bernard Legrand
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference , Jun 2015, Anchorage, United States. pp.2200-2203,
⟨10.1109/TRANSDUCERS.2015.7181397⟩
Conference papers
hal-01687809v1
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When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency
S. Houmadi
,
Bernard Legrand
,
J.P. Salvetat
,
B. Walter
,
E. Mairiaux
,
et al.
Conference papers
hal-01962374v1
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Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope
Fei Wang
,
Nicolas Clément
,
Damien Ducatteau
,
David Troadec
,
Hassan Tanbakuchi
,
et al.
Journal articles
hal-01960609v1
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Ultra-Low-Power Logic with Contactless Capacitive MEMS
Aleksandra Markovic
,
Laurent Mazenq
,
Adrian Laborde
,
Herve Fanet
,
Gael Pillonnet
,
et al.
21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022) , Dec 2022, Salt Lake City, United States. pp.233-227,
⟨10.1109/PowerMEMS56853.2022.10007572⟩
Conference papers
hal-03946985v1
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Very high frequency probes for atomic force microscopy with silicon optomechanics
L Schwab
,
P E Allain
,
Nicolas Mauran
,
Xavier Dollat
,
Laurent Mazenq
,
et al.
Journal articles
hal-03326075v2
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements
Lucien Schwab
,
Pierre-Etienne Allain
,
Louise Banniard
,
Nicolas Mauran
,
Denis Lagrange
,
et al.
IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019) , Jan 2019, Seoul, South Korea. pp.819-822,
⟨10.1109/MEMSYS.2019.8870718⟩
Conference papers
hal-02371188v1
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Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces
Pierre Etienne Allain
,
Lucien Schwab
,
Colin Mismer
,
Marc Gély
,
Estelle Mairiaux
,
et al.
Journal articles
hal-01908683v1
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A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution
A. Grira
,
C. Rotinat-Libersa
,
Bernard Legrand
,
L. Buchaillot
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014 , Jun 2014, Kos Island, Greece. pp.2407-2417
Conference papers
cea-01844451v1
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Two types of MEMS-based oscillating AFM probes
Zhuang Xiong
,
Estelle Mairiaux
,
Benjamin Walter
,
Marc Faucher
,
Lionel Buchaillot
,
et al.
Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141
Journal articles
hal-01960910v1
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The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory
Régis Hamelin
,
Géraldine Andrieux
,
Isabelle Chartier
,
Bahaa El Roustom
,
T. Healy
,
et al.
International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018 , Apr 2018, Dresden, Germany
Conference papers
hal-01962997v1
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Fabrication of nanoplate resonating structures via micro-masonry
Adhitya Bhaswara
,
Hohyun Keum
,
S Rhee
,
Bernard Legrand
,
Fabrice Mathieu
,
et al.
Journal articles
hal-01687810v1
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Multi-MHz micro-electro-mechanical sensors for atomic force microscopy
Bernard Legrand
,
Jean-Paul Salvetat
,
Benjamin Walter
,
Marc Faucher
,
Didier Theron
,
et al.
Journal articles
hal-01765180v1
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Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime
Aleksandra Markovic
,
Gaël Pillonnet
,
Bernard Legrand
Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22 , URSI, Mar 2022, Paris, France
Conference papers
hal-03649053v1
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High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration
Cécile Fuinel
,
Fabrice Mathieu
,
Adrian Laborde
,
Laurent Mazenq
,
Christian Bergaud
,
et al.
Conference papers
hal-01962426v1
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Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry
F. Wang
,
Thomas Dargent
,
D. Ducatteau
,
Gilles Dambrine
,
Kamel Haddadi
,
et al.
Conference papers
hal-01962399v1
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