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authIdHal_s : bernard-legrand

Driving and sensing M/NEMS flexural vibration using dielectric transduction

Cécile Fuinel , Fabrice Mathieu , Bernard Legrand
31st International Conference EUROSENSORS, EUROSENSORS 2017, Sep 2017, Paris, France
Conference papers hal-01962981v1
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Optimization of length and thickness of smart transduction layers on beam structures for control and M/NEMS applications

Olivier Thomas , Bernard Legrand , Cécile Fuinel
ASME 2015 Conference on Smart Materials Adaptive Structures and Intelligent Systems (SMASIS 2015), Sep 2015, Colorado Springs, United States. 9p., ⟨10.1115/SMASIS2015-8857⟩
Conference papers hal-01203144v1

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Lucien Schwab , Pierre Etienne E Allain , L Banniard , A Fafin , Marc Gely , et al.
64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States
Conference papers hal-01963015v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide

Laurent Mazenq , Lucien Schwab , Nicolas Mauran , Denis Lagrange , Xavier Dollat , et al.
[Rapport Technique] LAAS-CNRS. 2019
Reports hal-03603368v1

Design and measurement of AFM probe based on MEMS resonator

Zhuang Xiong , Bernard Legrand
High Power Laser and Particle Beams, 2015, 27 (2), pp.024119-1. ⟨10.11884/HPLPB201527.024119⟩
Journal articles hal-01961045v1
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High Speed Atomic Force Microscope

Nicolas Mauran , Denis Lagrange , Xavier Dollat , Laurent Mazenq , Lucien Schwab , et al.
NI-Week 2017, May 2017, Austin, TX, United States. , 2017
Poster communications hal-01529673v1
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Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq , et al.
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Conference papers hal-01279717v1
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Optomechanical resonating probe for very high frequency sensing of atomic forces

Pierre Etienne Allain , Lucien Schwab , Colin Mismer , Marc Gely , Estelle Mairiaux , et al.
Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/c9nr09690f⟩
Journal articles hal-02997481v1

Micro-masonry for the simple fabrication of nanoplate resonators with integrated electrostatic transduction transduction

Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim , et al.
42nd International Conference on Micro and Nano Engineering, MNE 2016, Sep 2016, Vienne, Austria
Conference papers hal-01962410v1
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Finite elements based reduced order models for nonlinear dynamics of piezoelectric and dielectric laminated micro/nanostructures

Olivier Thomas , Arthur Givois , Aurélien Grolet , Jean-François Deü , Cécile Fuinel , et al.
EUROMECH Colloquium 603, Dynamics of micro and nano systems, Sep 2018, Porto, Portugal
Conference papers hal-01962993v1

A Simple Fabrication Process Based on Micro-masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes

Adhitya Bhaswara , Hohyun Keum , Fabrice Mathieu , Bernard Legrand , Seok Kim , et al.
Frontiers of Mechanical Engineering in China, 2016, 2 (1), ⟨10.3389/fmech.2016.00001⟩
Journal articles hal-01960876v1

MEMS-based atomic force microscopy probes: from electromechanical to optomechanical vibrating sensors

Bernard Legrand , Lucien Schwab , Pierre Allain , Ivan Favero , Marc Faucher , et al.
AVS 65th International Symposium & Exhibition, American Vacuum Society, Oct 2018, Long Beach, United States
Conference papers hal-01908666v1
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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot , et al.
Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩
Journal articles hal-01960848v1

Characterization of sub-10nm-scale capacitors and tunnel junctions by SMM coupled to RF interferometry

Fei Wang , Damien Ducatteau , David Troadec , Hassan Tanbakuchi , Bernard Legrand , et al.
European Conference on Electrical Measurements at the Nanoscale Using AFM, Jun 2014, Cambridge, United Kingdom
Conference papers hal-01962209v1
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Low Latency Demodulation for High-Frequency Atomic Force Microscopy Probes

Denis Lagrange , Nicolas Mauran , Lucien Schwab , Bernard Legrand
IEEE Transactions on Control Systems Technology, 2021, 29 (5), pp.2264 - 2270. ⟨10.1109/TCST.2020.3028737⟩
Journal articles hal-02974151v1

Determination of the effective mass and stiffness of a micro resonator from a single optical characterization

Adhitya Bhaswara , Denis Dezest , Liviu Nicu , Thierry Leichle , Bernard Legrand
TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference, Jun 2015, Anchorage, United States. pp.2200-2203, ⟨10.1109/TRANSDUCERS.2015.7181397⟩
Conference papers hal-01687809v1

When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency

S. Houmadi , Bernard Legrand , J.P. Salvetat , B. Walter , E. Mairiaux , et al.
28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩
Conference papers hal-01962374v1

Quantitative impedance characterization of sub-10 nm scale capacitors and tunnel junctions with an interferometric scanning microwave microscope

Fei Wang , Nicolas Clément , Damien Ducatteau , David Troadec , Hassan Tanbakuchi , et al.
Nanotechnology, 2014, 25 (40), pp.405703. ⟨10.1088/0957-4484/25/40/405704⟩
Journal articles hal-01960609v1
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Ultra-Low-Power Logic with Contactless Capacitive MEMS

Aleksandra Markovic , Laurent Mazenq , Adrian Laborde , Herve Fanet , Gael Pillonnet , et al.
21st International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2022), Dec 2022, Salt Lake City, United States. pp.233-227, ⟨10.1109/PowerMEMS56853.2022.10007572⟩
Conference papers hal-03946985v1
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Very high frequency probes for atomic force microscopy with silicon optomechanics

L Schwab , P E Allain , Nicolas Mauran , Xavier Dollat , Laurent Mazenq , et al.
Microsystems & Nanoengineering, 2022, 8, pp.32. ⟨10.1038/s41378-022-00364-4⟩
Journal articles hal-03326075v2
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130-MHz Optomechanical Vibrating Sensor: Towards High Bandwidth / Ultrasensitive Measurements

Lucien Schwab , Pierre-Etienne Allain , Louise Banniard , Nicolas Mauran , Denis Lagrange , et al.
IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS 2019), Jan 2019, Seoul, South Korea. pp.819-822, ⟨10.1109/MEMSYS.2019.8870718⟩
Conference papers hal-02371188v1
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Optomechanical Resonating Probe for Very High Speed Sensing of Atomic Forces

Pierre Etienne Allain , Lucien Schwab , Colin Mismer , Marc Gély , Estelle Mairiaux , et al.
Nanoscale, 2020, 12 (5), pp.2939-2945. ⟨10.1039/C9NR09690F⟩
Journal articles hal-01908683v1

A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution

A. Grira , C. Rotinat-Libersa , Bernard Legrand , L. Buchaillot
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
Conference papers cea-01844451v1

Two types of MEMS-based oscillating AFM probes

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot , et al.
Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141
Journal articles hal-01960910v1

The gateone-project: a digital innovation hub accelerating innovation through ecosystem design and product trajectory

Régis Hamelin , Géraldine Andrieux , Isabelle Chartier , Bahaa El Roustom , T. Healy , et al.
International Conference and Exhibition on Integrated Issues of Miniaturized Systems Smart Systems Integration SSI 2018, Apr 2018, Dresden, Germany
Conference papers hal-01962997v1

Fabrication of nanoplate resonating structures via micro-masonry

Adhitya Bhaswara , Hohyun Keum , S Rhee , Bernard Legrand , Fabrice Mathieu , et al.
Journal of Micromechanics and Microengineering, 2014, 24 (11), pp.115012. ⟨10.1088/0960-1317/24/11/115012⟩
Journal articles hal-01687810v1
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Multi-MHz micro-electro-mechanical sensors for atomic force microscopy

Bernard Legrand , Jean-Paul Salvetat , Benjamin Walter , Marc Faucher , Didier Theron , et al.
Ultramicroscopy, 2017, 175, pp.46 - 57. ⟨10.1016/j.ultramic.2017.01.005⟩
Journal articles hal-01765180v1
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Towards near-zero-power logic gates based on capacitive MEMS devices operating in adiabatic regime

Aleksandra Markovic , Gaël Pillonnet , Bernard Legrand
Workshop nano, meso, micro: Science and innovation for radio and photonics, International Union of Radio Science, URSI France JS22, URSI, Mar 2022, Paris, France
Conference papers hal-03649053v1

High-K thin films for simultaneous dielectric actuation and detection of M/NEMS flexural vibration

Cécile Fuinel , Fabrice Mathieu , Adrian Laborde , Laurent Mazenq , Christian Bergaud , et al.
19th International Conference on Solid-State Sensors, Actuators and Microsystems TRANSDUCERS 17, Jun 2017, Kaohsiung, Taiwan. ⟨10.1109/TRANSDUCERS.2017.7994155⟩
Conference papers hal-01962426v1

Sub-10 nm-scale capacitors and tunnel junctions measurements by SMM coupled to RF interferometry

F. Wang , Thomas Dargent , D. Ducatteau , Gilles Dambrine , Kamel Haddadi , et al.
45th European Microwave Conference EuMC 2015, Sep 2015, Paris, France. ⟨10.1109/EuMC.2015.7345849⟩
Conference papers hal-01962399v1