Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS
Hugues Granier
,
Véronique Conédéra
,
Monique Dilhan
,
Franck Carcenac
,
Pierre-François Calmon
,
et al.
Rapport LAAS n° 17056. 2017
Technical Reports
hal-01485548v1
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Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS
Hugues Granier
,
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
,
et al.
Rapport LAAS n° 18107. 2018
Technical Reports
hal-01767583v1
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Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing
Christophe Thibault
,
Samuel Guillon
,
Sven Salomon
,
Florent Seichepine
,
Denis Dezest
,
et al.
Journal articles
istex
hal-01767603v1
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PZT Nanofilm-Based Wafer Scale Nanoresonators
Denis Dezest
,
Fabrice Mathieu
,
Laurent Mazenq
,
Liviu Nicu
,
Caroline Soyer
,
et al.
IEEE Frequency Control Symposium , Apr 2015, Denver, United States. 6p
Conference papers
hal-01144194v1
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A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding
Maria Dolores Manrique-Juarez
,
Fabrice Mathieu
,
Guillaume Libaude
,
Véronique Conédéra
,
David Bourrier
,
et al.
The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023) , Jan 2023, Munich, Germany. 2023
Poster communications
hal-03951363v1
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Moyens de lithographies de la plateforme de Micro et Nanotechnologies du LAAS-CNRS
Laurent Mazenq
,
Franck Carcenac
,
Pierre-François Calmon
,
Emmanuelle Daran
,
Adrian Laborde
,
et al.
Renatech Litho Gravure , Jan 2023, Lille, France. 2023
Poster communications
hal-03976338v1
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Bilan des activités 2021 de la plateforme de micro et nanotechnologies du LAAS-CNRS
Alexandre Arnoult
,
David Bourrier
,
Laurent Bouscayrol
,
Pierre-François Calmon
,
Franck Carcenac
,
et al.
Rapport LAAS n° 22125. 2022
Technical Reports
hal-03646902v1
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Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers
Samuel Guillon
,
Daisuke Saya
,
Laurent Mazenq
,
Sorin Perisanu
,
Pascal Vincent
,
et al.
Journal articles
hal-01343625v1
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SINGLE STEP PATTERNING OF MOLECULARLY IMPRINTED POLYMERS FOR LARGE SCALE FABRICATION OF BIOCHIPS
Samuel Guillon
,
Rémi Lemaire
,
David Bourrier
,
Laurent Mazenq
,
Fabien Mesnilgrente
,
et al.
MIP 2008 , 2008, Japan
Conference papers
hal-00406136v1
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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators
Denis Dezest
,
Fabrice Mathieu
,
Laurent Mazenq
,
Caroline Soyer
,
Jean Costecalde
,
et al.
2013 Nanomechanical Sensing Workshop , May 2013, Stanford, USA, United States. pp.0
Conference papers
hal-03165172v1
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Développement de procédés de lithographie UV de résines photosensibles sur l'équipement Suss Microtec MA6 Gen 4
Julien Joneau
,
Adrian Laborde
,
Laurent Mazenq
[Rapport Technique] Rapport LAAS n° 18698, LAAS-CNRS. 2018
Reports
hal-02902736v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility
Isabelle Dufour
,
Luis Iglesias Hernandez
,
Priyadarshini Shanmugam
,
Jean-François Michaud
,
Laurent Colin
,
et al.
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022) , Apr 2022, Paris, France
Conference papers
hal-03778623v1
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Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors
Ahmet Lale
,
Auriane Grappin
,
David Bourrier
,
Laurent Mazenq
,
Aurélie Lecestre
,
et al.
Conference papers
hal-01871397v1
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Development of an ISFET-based analysis microsystem for nitrogen cycle monitoring in durum wheat crop Introduction
Mathieu Joly
,
Sandrine Assié-Souleille
,
Laurent Mazenq
,
Maurane Marlet
,
Pierre Temple-Boyer
,
et al.
4th CIGR international conference of agriculture engineering, CIGR AgEng 2016 , Jun 2016, Aarhus, Denmark. 12p
Conference papers
hal-01871427v1
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Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids
Pierre Temple-Boyer
,
Laurent Mazenq
,
Jean-Baptiste Doucet
,
Véronique Conédéra
,
Benoit Torbiero
,
et al.
Journal articles
hal-01687852v1
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Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays
Florian Larramendy
,
Marie-Charline Blatché
,
Laurent Mazenq
,
Adrian Laborde
,
Pierre Temple-Boyer
,
et al.
Journal articles
hal-01225646v1
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Cpw-fed slot microstrip MEMS-based reconfigurable arrays
Loïc Le Garrec
,
Mohamed Himdi
,
Ronan Sauleau
,
Laurent Mazenq
,
Katia Grenier
,
et al.
IEEE AP-S International Symposium , Jun 2004, Monterey, United States. pp.1835-1838
Conference papers
hal-00549299v1
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Geometry optimization of uncoated silicon microcantilever-based gas density sensors
Mohand-Tayeb Boudjiet
,
Johan Bertrand
,
Fabrice Mathieu
,
Liviu Nicu
,
Laurent Mazenq
,
et al.
Journal articles
hal-01082346v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide
Laurent Mazenq
,
Lucien Schwab
,
Nicolas Mauran
,
Denis Lagrange
,
Xavier Dollat
,
et al.
[Rapport Technique] LAAS-CNRS. 2019
Reports
hal-03603368v1
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Micro and nanotechnology evolution towards vertical Silicon nanowires for ultra-sensitive gas detection
Philippe Menini
,
Brieux Durand
,
Guilhem Larrieu
,
Audrey Chapelle
,
Aurélie Lecestre
,
et al.
IX International Workshop on Semiconductor Gas Sensors SGS 2015 , Dec 2015, Zakopane, Poland
Conference papers
hal-02048921v1
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Mise au point d'un dépôt HMDS sur la plaque OBDUCAT QS V 200 BM
Séverine Vivies
,
Adrian Laborde
,
Julien Joneau
,
Laurent Mazenq
,
Hugues Granier
[Rapport Technique] LAAS-CNRS. 2018
Reports
hal-02572420v1
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All-solid-state multimodal probe based on ISFET electrochemical microsensors for in-situ soil nutrients monitoring in agriculture
Matthieu Joly
,
Laurent Mazenq
,
Maurane Marlet
,
Pierre Temple-Boyer
,
Céline Durieu
,
et al.
Conference papers
hal-01871403v1
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Design, realization and characterization of several types of micro-initiators integrating Al/CuO nanothermite: role of metallic micro-heater and substrate on fire/no fire characteristics
Andréa Nicollet
,
Sandrine Assié-Souleille
,
Ludovic Glavier
,
Laurent Mazenq
,
Ludovic Salvagnac
,
et al.
42nd International Pyrotechnics Seminar , Jul 2016, Grand Junction, CO, United States
Conference papers
hal-01688039v1
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Technological bricks development for the vertical integration of a Modulator onto a VCSEL for high-speed communications
Ludovic Marigo-Lombart
,
Alexandre Arnoult
,
Stéphane Calvez
,
Christophe Viallon
,
Olivier Gauthier-Lafaye
,
et al.
Journées Nationales sur les Technologies Emergentes , Nov 2019, Grenoble, France. 2p
Conference papers
hal-02449214v1
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Single step patterning of molecularly imprinted polymers for large scale fabrication of biochips
Samuel Guillon
,
Rémi Lemaire
,
David Bourrier
,
Laurent Mazenq
,
Fabien Mesnilgrente
,
et al.
Micro and Nano Engineering 2008 , 2008, Greece
Conference papers
hal-00406127v1
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Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range
Léopold Macé
,
Olivier Gauthier-Lafaye
,
Antoine Monmayrant
,
Henri Camon
,
Pascal Dubreuil
,
et al.
20th International Conference on Transparent Optical Networks (ICTON 2018) , Jul 2018, Bucharest, Romania
Conference papers
hal-01917558v1
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High Speed Atomic Force Microscope
Nicolas Mauran
,
Denis Lagrange
,
Xavier Dollat
,
Laurent Mazenq
,
Lucien Schwab
,
et al.
NI-Week 2017 , May 2017, Austin, TX, United States.
, 2017
Poster communications
hal-01529673v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS
Cécile Fuinel
,
Khadim Daffé
,
Adrian Laborde
,
Olivier Thomas
,
Laurent Mazenq
,
et al.
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016) , IEEE, Jan 2016, Shanghai, China.
⟨10.1109/MEMSYS.2016.7421850⟩
Conference papers
hal-01279717v1
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Development of pH-based ElecFET biosensors for lactate ion detection
Abdou Karim Diallo
,
Lyas Djeghlaf
,
Laurent Mazenq
,
Jérôme Launay
,
William Sant
,
et al.
Journal articles
hal-01508091v1
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VCSELs fabricated using self-aligned processing
Ludovic Marigo-Lombart
,
Alexandre Arnoult
,
Laurent Mazenq
,
Pascal Dubreuil
,
Benjamin Reig
,
et al.
Workshop VCSEL Day 2016 , Jun 2016, Darmstadt, Germany. 2p
Conference papers
hal-01857634v1
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