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authIdHal_s : laurent-mazenq
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Bilan des activités de la plateforme de micro et nano technologies du LAAS-CNRS

Hugues Granier , Véronique Conédéra , Monique Dilhan , Franck Carcenac , Pierre-François Calmon , et al.
Rapport LAAS n° 17056. 2017
Technical Reports hal-01485548v1
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Un bilan des activités 2017 de la plateforme de micro et nanotechnologies du LAAS-CNRS

Hugues Granier , Alexandre Arnoult , David Bourrier , Laurent Bouscayrol , Pierre-François Calmon , et al.
Rapport LAAS n° 18107. 2018
Technical Reports hal-01767583v1

Biological functionalization of massively parallel arrays of nanocantilevers using microcontact printing

Christophe Thibault , Samuel Guillon , Sven Salomon , Florent Seichepine , Denis Dezest , et al.
Sensors and Actuators B: Chemical, 2012, 161 (1), pp.1135 - 1138. ⟨10.1016/j.snb.2011.10.084⟩
Journal articles istex hal-01767603v1
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PZT Nanofilm-Based Wafer Scale Nanoresonators

Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Liviu Nicu , Caroline Soyer , et al.
IEEE Frequency Control Symposium, Apr 2015, Denver, United States. 6p
Conference papers hal-01144194v1
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A simple process for the fabrication of parallel-plate electrostatic MEMS resonators by gold thermocompression bonding

Maria Dolores Manrique-Juarez , Fabrice Mathieu , Guillaume Libaude , Véronique Conédéra , David Bourrier , et al.
The 36th International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2023), Jan 2023, Munich, Germany. 2023
Poster communications hal-03951363v1
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Moyens de lithographies de la plateforme de Micro et Nanotechnologies du LAAS-CNRS

Laurent Mazenq , Franck Carcenac , Pierre-François Calmon , Emmanuelle Daran , Adrian Laborde , et al.
Renatech Litho Gravure, Jan 2023, Lille, France. 2023
Poster communications hal-03976338v1
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Bilan des activités 2021 de la plateforme de micro et nanotechnologies du LAAS-CNRS

Alexandre Arnoult , David Bourrier , Laurent Bouscayrol , Pierre-François Calmon , Franck Carcenac , et al.
Rapport LAAS n° 22125. 2022
Technical Reports hal-03646902v1
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Effect of non-ideal clamping shape on the resonance frequencies of silicon nanocantilevers

Samuel Guillon , Daisuke Saya , Laurent Mazenq , Sorin Perisanu , Pascal Vincent , et al.
Nanotechnology, 2011, 22 (24), pp.id 245501. ⟨10.1088/0957-4484/22/24/245501⟩
Journal articles hal-01343625v1

SINGLE STEP PATTERNING OF MOLECULARLY IMPRINTED POLYMERS FOR LARGE SCALE FABRICATION OF BIOCHIPS

Samuel Guillon , Rémi Lemaire , David Bourrier , Laurent Mazenq , Fabien Mesnilgrente , et al.
MIP 2008, 2008, Japan
Conference papers hal-00406136v1
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Wafer-scale integration of piezoelectric actuation capabilities in nanoelectromechanical systems resonators

Denis Dezest , Fabrice Mathieu , Laurent Mazenq , Caroline Soyer , Jean Costecalde , et al.
2013 Nanomechanical Sensing Workshop, May 2013, Stanford, USA, United States. pp.0
Conference papers hal-03165172v1
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Développement de procédés de lithographie UV de résines photosensibles sur l'équipement Suss Microtec MA6 Gen 4

Julien Joneau , Adrian Laborde , Laurent Mazenq
[Rapport Technique] Rapport LAAS n° 18698, LAAS-CNRS. 2018
Reports hal-02902736v1
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H2MEMS Project: Resonant MEMS for detection of hydrogen release in radioactive waste disposal facility

Isabelle Dufour , Luis Iglesias Hernandez , Priyadarshini Shanmugam , Jean-François Michaud , Laurent Colin , et al.
Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF / IFCS 2022), Apr 2022, Paris, France
Conference papers hal-03778623v1
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Design, realization and characterization of all-arround SiO2/Al2O3gate, suspended silicon nanowire chemical field effect transistors

Ahmet Lale , Auriane Grappin , David Bourrier , Laurent Mazenq , Aurélie Lecestre , et al.
19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994346⟩
Conference papers hal-01871397v1

Development of an ISFET-based analysis microsystem for nitrogen cycle monitoring in durum wheat crop Introduction

Mathieu Joly , Sandrine Assié-Souleille , Laurent Mazenq , Maurane Marlet , Pierre Temple-Boyer , et al.
4th CIGR international conference of agriculture engineering, CIGR AgEng 2016, Jun 2016, Aarhus, Denmark. 12p
Conference papers hal-01871427v1
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Theoretical studies of the spin coating process for the deposition of polymer-based Maxwellian liquids

Pierre Temple-Boyer , Laurent Mazenq , Jean-Baptiste Doucet , Véronique Conédéra , Benoit Torbiero , et al.
Microelectronic Engineering, 2010, 87 (2), pp.163-166. ⟨10.1016/j.mee.2009.06.030⟩
Journal articles hal-01687852v1
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Microchannel-connected SU-8 honeycombs by single-step projection photolithography for positioning cells on silicon oxide nanopillar arrays

Florian Larramendy , Marie-Charline Blatché , Laurent Mazenq , Adrian Laborde , Pierre Temple-Boyer , et al.
Journal of Micromechanics and Microengineering, 2015, 25 (4), pp.045010. ⟨10.1088/0960-1317/25/4/045010⟩
Journal articles hal-01225646v1

Cpw-fed slot microstrip MEMS-based reconfigurable arrays

Loïc Le Garrec , Mohamed Himdi , Ronan Sauleau , Laurent Mazenq , Katia Grenier , et al.
IEEE AP-S International Symposium, Jun 2004, Monterey, United States. pp.1835-1838
Conference papers hal-00549299v1
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Geometry optimization of uncoated silicon microcantilever-based gas density sensors

Mohand-Tayeb Boudjiet , Johan Bertrand , Fabrice Mathieu , Liviu Nicu , Laurent Mazenq , et al.
Sensors and Actuators B: Chemical, 2015, 208, pp.600-607. ⟨10.1016/j.snb.2014.11.067⟩
Journal articles hal-01082346v1
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Développement d'une platine de déplacements nanométriques pour la réalisation d'un Microscope à Force Atomique (AFM) rapide

Laurent Mazenq , Lucien Schwab , Nicolas Mauran , Denis Lagrange , Xavier Dollat , et al.
[Rapport Technique] LAAS-CNRS. 2019
Reports hal-03603368v1
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Micro and nanotechnology evolution towards vertical Silicon nanowires for ultra-sensitive gas detection

Philippe Menini , Brieux Durand , Guilhem Larrieu , Audrey Chapelle , Aurélie Lecestre , et al.
IX International Workshop on Semiconductor Gas Sensors SGS 2015, Dec 2015, Zakopane, Poland
Conference papers hal-02048921v1
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Mise au point d'un dépôt HMDS sur la plaque OBDUCAT QS V 200 BM

Séverine Vivies , Adrian Laborde , Julien Joneau , Laurent Mazenq , Hugues Granier
[Rapport Technique] LAAS-CNRS. 2018
Reports hal-02572420v1
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All-solid-state multimodal probe based on ISFET electrochemical microsensors for in-situ soil nutrients monitoring in agriculture

Matthieu Joly , Laurent Mazenq , Maurane Marlet , Pierre Temple-Boyer , Céline Durieu , et al.
19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017), Jun 2017, Kaohsiung, Taiwan. 4p., ⟨10.1109/TRANSDUCERS.2017.7994028⟩
Conference papers hal-01871403v1

Design, realization and characterization of several types of micro-initiators integrating Al/CuO nanothermite: role of metallic micro-heater and substrate on fire/no fire characteristics

Andréa Nicollet , Sandrine Assié-Souleille , Ludovic Glavier , Laurent Mazenq , Ludovic Salvagnac , et al.
42nd International Pyrotechnics Seminar, Jul 2016, Grand Junction, CO, United States
Conference papers hal-01688039v1
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Technological bricks development for the vertical integration of a Modulator onto a VCSEL for high-speed communications

Ludovic Marigo-Lombart , Alexandre Arnoult , Stéphane Calvez , Christophe Viallon , Olivier Gauthier-Lafaye , et al.
Journées Nationales sur les Technologies Emergentes, Nov 2019, Grenoble, France. 2p
Conference papers hal-02449214v1

Single step patterning of molecularly imprinted polymers for large scale fabrication of biochips

Samuel Guillon , Rémi Lemaire , David Bourrier , Laurent Mazenq , Fabien Mesnilgrente , et al.
Micro and Nano Engineering 2008, 2008, Greece
Conference papers hal-00406127v1

Fabrication of Doubly-Corrugated Zero-Contrast-Grating for Broadband Pixelated Filtering in the Mid-IR Range

Léopold Macé , Olivier Gauthier-Lafaye , Antoine Monmayrant , Henri Camon , Pascal Dubreuil , et al.
20th International Conference on Transparent Optical Networks (ICTON 2018), Jul 2018, Bucharest, Romania
Conference papers hal-01917558v1
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High Speed Atomic Force Microscope

Nicolas Mauran , Denis Lagrange , Xavier Dollat , Laurent Mazenq , Lucien Schwab , et al.
NI-Week 2017, May 2017, Austin, TX, United States. , 2017
Poster communications hal-01529673v1
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HIGH-K THIN FILMS AS DIELECTRIC TRANSDUCERS FOR FLEXURAL M/NEMS RESONATORS

Cécile Fuinel , Khadim Daffé , Adrian Laborde , Olivier Thomas , Laurent Mazenq , et al.
The 29th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2016), IEEE, Jan 2016, Shanghai, China. ⟨10.1109/MEMSYS.2016.7421850⟩
Conference papers hal-01279717v1
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Development of pH-based ElecFET biosensors for lactate ion detection

Abdou Karim Diallo , Lyas Djeghlaf , Laurent Mazenq , Jérôme Launay , William Sant , et al.
Biosensors and Bioelectronics, 2013, 40 (1), pp.291-296. ⟨10.1016/j.bios.2012.07.063⟩
Journal articles hal-01508091v1

VCSELs fabricated using self-aligned processing

Ludovic Marigo-Lombart , Alexandre Arnoult , Laurent Mazenq , Pascal Dubreuil , Benjamin Reig , et al.
Workshop VCSEL Day 2016, Jun 2016, Darmstadt, Germany. 2p
Conference papers hal-01857634v1