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authIdHal_s : lionel-buchaillot
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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot , et al.
Sensors, 2014, 14 (11), pp.20667-20686. ⟨10.3390/s141120667⟩
Journal articles hal-01960848v1

A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution

A. Grira , C. Rotinat-Libersa , Bernard Legrand , L. Buchaillot
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
Conference papers cea-01844451v1

Two types of MEMS-based oscillating AFM probes

Zhuang Xiong , Estelle Mairiaux , Benjamin Walter , Marc Faucher , Lionel Buchaillot , et al.
Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141
Journal articles hal-01960910v1
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Sputtered titanium carbide thick film for high areal energy on chip carbon-based micro-supercapacitors

Manon Létiche , Kevin Brousse , Arnaud Demortiere , Peihua Huang , Barbara Daffos , et al.
Advanced Functional Materials, 2017, 27 (20), ⟨10.1002/adfm.201606813⟩
Journal articles hal-01582136v1

Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?

Lionel Buchaillot , Estelle Mairiaux , Benjamin Walter , Zhuang Xiong , Marc Faucher , et al.
IEEE International Frequency Control Symposium, May 2014, Taipei, Taiwan. ⟨10.1109/FCS.2014.6859928⟩
Conference papers hal-01962163v1