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A Novel Dog-Bone Oscillating AFM Probe with Thermal Actuation and Piezoresistive Detection
Zhuang Xiong
,
Estelle Mairiaux
,
Benjamin Walter
,
Marc Faucher
,
Lionel Buchaillot
,
et al.
Journal articles
hal-01960848v1
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A new optimal design method for electrostatically actuated silicon-based MEMS: Application to a micro-gripper with large stroke and high force resolution
A. Grira
,
C. Rotinat-Libersa
,
Bernard Legrand
,
L. Buchaillot
1st International Conference on Engineering and Applied Sciences Optimization, OPT-i 2014, Jun 2014, Kos Island, Greece. pp.2407-2417
Conference papers
cea-01844451v1
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Two types of MEMS-based oscillating AFM probes
Zhuang Xiong
,
Estelle Mairiaux
,
Benjamin Walter
,
Marc Faucher
,
Lionel Buchaillot
,
et al.
Journal of Chinese Electron Microscopy Society , 2014, 2, pp.137-141
Journal articles
hal-01960910v1
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Sputtered titanium carbide thick film for high areal energy on chip carbon-based micro-supercapacitors
Manon Létiche
,
Kevin Brousse
,
Arnaud Demortiere
,
Peihua Huang
,
Barbara Daffos
,
et al.
Journal articles
hal-01582136v1
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Near-field microscopy: Is there an alternative to micro and nano resonating cantilevers?
Lionel Buchaillot
,
Estelle Mairiaux
,
Benjamin Walter
,
Zhuang Xiong
,
Marc Faucher
,
et al.
Conference papers
hal-01962163v1
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