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Fabrication and evaluation of an on-chip liquid micro-variable inductorJournal of Micromechanics and Microengineering, 2011, 21 (2), pp.025018. ⟨10.1088/0960-1317/21/2/025018⟩
Journal articles
istex
hal-03976862v1
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Variable RF MEMS fluidic inductor incorporating lamination processMicro and Nano Letters, 2010, 5 (6), pp.1380-1383. ⟨10.1049/mnl.2010.0131⟩
Journal articles
hal-03977048v1
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Study of a tunable MEMS capacitor: influence of fluidsElectronics Letters, 2016, 53 (2), pp.72-73
Journal articles
hal-01415341v1
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