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Structure: Internal structure identifier : 6267

Fabrication and evaluation of an on-chip liquid micro-variable inductor

Issam El Gmati , Pierre Francois Calmon , Ali Boukabache , Patrick Pons , Rémy Fulcrand , et al.
Journal of Micromechanics and Microengineering, 2011, 21 (2), pp.025018. ⟨10.1088/0960-1317/21/2/025018⟩
Journal articles istex hal-03976862v1

Variable RF MEMS fluidic inductor incorporating lamination process

I. El Gmati , P. Calmon , R. Fulcrand , Patrick Pons , A. Boukabache , et al.
Micro and Nano Letters, 2010, 5 (6), pp.1380-1383. ⟨10.1049/mnl.2010.0131⟩
Journal articles hal-03977048v1
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Study of a tunable MEMS capacitor: influence of fluids

H Habbachi , H Boussetta , Ali Boukabache , K A Kallala , Patrick Pons , et al.
Electronics Letters, 2016, 53 (2), pp.72-73
Journal articles hal-01415341v1