Controlled sealing of nanopores using an easily fabricated silicon platform combining in situ optical and electrical monitoring
Résumé
Nanopores are of great interest for biosensing applications. However, using such sensing platforms requires long and costly fabrication processes and the implementation of simultaneous electrical recording and optical imaging is not straightforward. Here, we present a new approach for silicon nanopore fabrication and integration avoiding backside etching of the substrate and allowing direct microfluidics integration for electrical recording and optical imaging. We demonstrate an electrical and optical live in situ detection of the electrophoretic trapping of polystyrene microspheres on silicon nanopores. This trapping procedure could also be used to partially close already made nanopores, in order to increase their sensitivity to small analytes.