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Journal Articles Microelectronic Engineering Year : 2015

Controlled sealing of nanopores using an easily fabricated silicon platform combining in situ optical and electrical monitoring

Abstract

Nanopores are of great interest for biosensing applications. However, using such sensing platforms requires long and costly fabrication processes and the implementation of simultaneous electrical recording and optical imaging is not straightforward. Here, we present a new approach for silicon nanopore fabrication and integration avoiding backside etching of the substrate and allowing direct microfluidics integration for electrical recording and optical imaging. We demonstrate an electrical and optical live in situ detection of the electrophoretic trapping of polystyrene microspheres on silicon nanopores. This trapping procedure could also be used to partially close already made nanopores, in order to increase their sensitivity to small analytes.
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Dates and versions

hal-01767667 , version 1 (16-04-2018)

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Raphaël Marchand, Franck Carcenac, Laurent Malaquin, Emmanuelle Trévisiol, Christophe Vieu, et al.. Controlled sealing of nanopores using an easily fabricated silicon platform combining in situ optical and electrical monitoring. Microelectronic Engineering, 2015, 144, pp.57 - 60. ⟨10.1016/j.mee.2015.03.032⟩. ⟨hal-01767667⟩
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