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Conference Papers Year : 2018

Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors

Lucien Schwab
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Abstract

Cavity optomechanics devices are leading edge candidates for a new generation of sensors both in the quantum and classical realms. Several single devices have been demonstrated in numerous labs, however large-scale integration capability necessary for industrial deployment is still an issue. In this paper, we present very-large-scale integrated (VLSI) optomechanical sensors fabricated from standard 200 mm Silicon-On-Insulator (SOI) wafers. Optical properties over a statistically significant sample size have been systematically investigated and show an excellent modeling to experiment agreement, a coupling parameter dispersion of 7% and a manufacturing yield larger than 98%. Controlled versatile sensors, such as these, could easily be embedded in any chip where mass or force sensing is needed.
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Dates and versions

hal-01963015 , version 1 (21-12-2018)

Identifiers

  • HAL Id : hal-01963015 , version 1

Cite

Lucien Schwab, Pierre Etienne Allain, L Banniard, A Fafin, Marc Gely, et al.. Comprehensive optical losses investigation of VLSI Silicon optomechanical ring resonator sensors. 64th International Electron Devices Meeting (IEDM 2018), IEEE, Dec 2018, San Francisco, United States. ⟨hal-01963015⟩
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