Challenges in nanofabrication for efficient optical metasurfaces - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
Journal Articles Scientific Reports Year : 2021

Challenges in nanofabrication for efficient optical metasurfaces


Abstract Optical metasurfaces have raised immense expectations as cheaper and lighter alternatives to bulk optical components. In recent years, novel components combining multiple optical functions have been proposed pushing further the level of requirement on the manufacturing precision of these objects. In this work, we study in details the influence of the most common fabrication errors on the optical response of a metasurface and quantitatively assess the tolerance to fabrication errors based on extensive numerical simulations. We illustrate these results with the design, fabrication and characterization of a silicon nanoresonator-based metasurface that operates as a beam deflector in the near-infrared range.
Fichier principal
Vignette du fichier
s41598-021-84666-z.pdf (5.74 Mo) Télécharger le fichier
Origin Publisher files allowed on an open archive

Dates and versions

hal-03367438 , version 1 (06-10-2021)



Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter Wiecha, et al.. Challenges in nanofabrication for efficient optical metasurfaces. Scientific Reports, 2021, 11 (1), pp.5620. ⟨10.1038/s41598-021-84666-z⟩. ⟨hal-03367438⟩
63 View
31 Download



Gmail Mastodon Facebook X LinkedIn More