Shock Tube Characterization of Air Blast Pressure Sensor Based on Ultra-Miniature Silicon Membrane and Piezoresistive Gauges
Résumé
The damage of a blast wave is associated with the peak static overpressure. In order to measure accurately this parameter, transducers with reaction time < 1 µs are required. To fulfill these specifications, transducers must have very small sensing dimension (<100µm) as well as a high fundamental resonant frequency.
A pressure transducer, designed for air blast monitoring, was manufactured. It is based on ultra-miniature silicon membrane whose deflection is monitored through silicon gauges. Shock tube measurement in the reflected configuration (i.e. when shock wave front is parallel to the transducer surface) indicates a sensor reaction time smaller than 0.5 µs.