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Communication Dans Un Congrès Année : 2023

On-chip sample preparation and biosensing: Can porous silicon membranes do it all?

Résumé

Porous silicon is a promising material for analytical biology, which has been used not only for biosensing but also for sample preparation in microfluidics. We therefore speculate that porous silicon membranes can be used to achieve all the functions involved in the analytical process on a single chip. However, integrating several membranes with the different characteristics required to implement these functions on-chip is challenging. In this work, we present a fabrication strategy for the monolithic integration of multiple membranes with tunable properties in planar microfluidics, thus paving the way towards the use of porous silicon to do it all, from sample preparation to biosensing.
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Dates et versions

hal-04473903 , version 1 (23-02-2024)

Identifiants

Citer

Thierry Leichle, Y. He, D. Silvade Vasconcellos, Éric Imbernon, David Bourrier. On-chip sample preparation and biosensing: Can porous silicon membranes do it all?. 2023 International Electron Devices Meeting (IEDM), Dec 2023, San Francisco, United States. pp.1-4, ⟨10.1109/IEDM45741.2023.10413798⟩. ⟨hal-04473903⟩
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