When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes Access content directly
Conference Papers Year : 2015

When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency

Abstract

We show that the capacitive transduction of a MEMS device using a setup based on a microwave detection scheme achieves the measurement of the thermomechanical noise spectrum of a high-frequency (>10 MHz) high-stiffness (>10 5 N/m) resonator, reaching the outstanding displacement resolution of 1 fm/√Hz. This result paves the way for vibrating sensors with exquisite force resolution in the fN/vHz range, enabling large-bandwidth measurements of mechanical interactions at small scale and rheology of fluids at very high frequency. An example of application is given and concerns atomic force microscopy images of biomolecular assemblies.
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hal-01962374 , version 1 (20-12-2018)

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S. Houmadi, Bernard Legrand, J.P. Salvetat, B. Walter, E. Mairiaux, et al.. When capacitive transduction meets the thermomechanical limit: Towards femto-newton force sensors at very high frequency. 28th IEEE Conference on Micro Electro Mechanical Systems, MEMS 2015, Jan 2015, Estoril, Portugal. ⟨10.1109/MEMSYS.2015.7050908⟩. ⟨hal-01962374⟩
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