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Conference Papers Year : 2021

Influence of nanofabrication errors on optical metasurfaces performances: study and minimization strategies

Abstract

Through simulation design, fabrication and characterization of optical sili- con metasurfaces, we discuss the influence of different nanofabrication errors and propose strategies to optimize the robustness of the fabrication of complex metasurfaces.
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Dates and versions

hal-03371657 , version 1 (08-10-2021)

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  • HAL Id : hal-03371657 , version 1

Cite

Adelin Patoux, Gonzague Agez, Christian Girard, Vincent Paillard, Peter Wiecha, et al.. Influence of nanofabrication errors on optical metasurfaces performances: study and minimization strategies. Flat Optics: Components to Systems 2021, Jun 2021, Washington, DC, United States. ⟨hal-03371657⟩
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