Process management in an academic laboratory: recipe library, data access, monitoring, different tools to be implemented
Résumé
The processes developed in cleanrooms are often very specific to a particular technique,
equipment or application. In academic organizations, we are sometimes facing the loss of
knowledge with difficulties to take over technologies developed in the past.
We propose here an approach to improve the quality of the processes developed on the
photolithography resources and which will be in open access to all users of the LAAS platform.
In this quality approach, several tools have been set up.
First of all, we propose to develop some processes and to offer a library with a large panel of
recipes in terms of dimensions and applications: plasma etching, deep etching, lift off,
electroplating, etc. Several features have been taken into consideration: generic designs,
standardized protocols, systematic characterization processes and data access via the MyFab
platform management system.
Secondly, we will present the methods to ensure the control of operations at different scales.
For standard processes, we provide qualification operations as well as a statistical process
control by using the data of the controls performed by the users. For more specific processes,
a shared database is accessible to users to share process parameters.
Through these different systems, which have been progressively implemented over the past
10 years, our management system has helped us to improve data sharing between users and
assure quality of technological operations.
These initiatives could be extended outside of the laboratory in order to share these good
practices and improve knowledge sharing by working in a network.
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