Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes
Journal Articles Sensors and Actuators A: Physical Year : 2024

Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration

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Micro and nanotechnologies/Microelectronics
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Submitted on : Friday, August 9, 2024-1:39:58 PM

Last modification on : Tuesday, September 3, 2024-11:16:05 AM

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hal-04669764 , version 1 (09-08-2024)

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A. Marković, H. Fanet, G. Pillonnet, B. Legrand. Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration. Sensors and Actuators A: Physical , 2024, 376, pp.115652. ⟨10.1016/j.sna.2024.115652⟩. ⟨hal-04669764⟩

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CEA UNIV-TLSE2 CNRS INSA-TOULOUSE LAAS UT1-CAPITOLE LAAS-MICRO-NANO-BIO-TECHNOLOGIES DRT LAAS-MEMS LETI INSA-GROUPE CEA-GRE ANR TOULOUSE-INP UNIV-UT3 UT3-TOULOUSEINP RENATECH
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