Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration - LAAS - Laboratoire d'Analyse et d'Architecture des Systèmes
Article Dans Une Revue Sensors and Actuators A: Physical Année : 2024

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hal-04669764 , version 1 (09-08-2024)

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A. Marković, H. Fanet, G. Pillonnet, B. Legrand. Behavior analysis of comb-drive actuators operating in near-zero-overlap configuration. Sensors and Actuators A: Physical , 2024, 376, pp.115652. ⟨10.1016/j.sna.2024.115652⟩. ⟨hal-04669764⟩
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