Anisotropy in the wet thermal oxidation of AlGaAs: influence of process parameters
Résumé
The crystallographic anisotropy of the lateral selective thermal oxidation of
AlGaAs alloys is experimentally studied. The anisotropic behavior of this oxidation process,
used primarily for building a lateral confinement in vertical surface emitting lasers (VCSEL),
is quantified by varying different process parameters and the geometrical shapes of laterally
oxidized mesa structures. This experimental study aims to have a better control of the oxide
aperture shape used in oxide-confined photonics devices.
Fichier principal
Lafleur_OMEx2018_process_dependence_of_AlOx_anisotropy.pdf (2.54 Mo)
Télécharger le fichier
| Origine | Fichiers éditeurs autorisés sur une archive ouverte |
|---|
Loading...